a flexible membrane
A technology of flexible film and flexible substrate, applied in the field of flexible film, can solve the problems of increased cost, complex material structure, easy oxidation of silver, etc.
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Embodiment 1
[0038] Put the 23u PET coil in the unwinding chamber, replace the winding chamber with a new core, clean the chamber, replace the protective plate, and wait for the vacuum to -6 Mbar started production; under the protection of argon, the gas flow rate is 400sccm~500sccm, the chamber uses NiCr target material, medium frequency power (MFpower) discharge, so that NiCr is sputtered on the PET surface, so that the thickness of the NiCr layer is 10nm; then the chamber Using a Cu alloy target, under the protection of argon, the gas flow rate is 400-500 sccm, MF power discharge, so that the surface of the NiCr layer is sputtered with a 10nm CuSn layer; finally, the chamber is replaced with a NiCr target, under the protection of argon, the gas The flow rate is 400-500sccm, and the MF power is discharged to make the thickness of the NiCr layer to be 17nm to obtain a flexible film.
[0039] The performance of the flexible film was detected according to the ASTM D1003 standard. The experim...
Embodiment 2
[0041] Put the 23u PET coil in the unwinding chamber, replace the winding chamber with a new core, clean the chamber, replace the protective plate, and wait for the vacuum to -6 Mbar started production; under the protection of argon, the gas flow rate is 400sccm~500sccm, the chamber uses NiCr target material, medium frequency power (MFpower) discharge, so that NiCr is sputtered on the PET surface, so that the thickness of the NiCr layer is 15nm; then the chamber Using a Cu alloy target, under the protection of argon, the gas flow rate is 400-500 sccm, MF power discharge, so that the surface of the NiCr layer is sputtered with a 15nm CuSn layer; finally, the chamber is replaced with a NiCr target, under the protection of argon, the gas The flow rate is 400-500 sccm, and the MF power is discharged to make the thickness of the NiCr layer to be 20nm to obtain a flexible film.
[0042] The performance of the flexible film was detected according to the ASTMD1003 standard. The experim...
Embodiment 3
[0044] Put the 23u PET coil in the unwinding chamber, replace the winding chamber with a new core, clean the chamber, replace the protective plate, and wait for the vacuum to -6 Mbar started production; under the protection of argon, the gas flow rate is 400sccm~500sccm, the chamber uses NiCr target material, medium frequency power (MFpower) discharge, so that NiCr is sputtered on the PET surface, so that the thickness of the NiCr layer is 12nm; then the chamber Using a Cu alloy target, under the protection of argon, the gas flow rate is 400-500 sccm, and the MF power discharges, so that the surface of the NiCr layer is sputtered with a 12nm CuSn layer; finally, the chamber is replaced with a NiCr target, and under the protection of argon, the gas The flow rate is 400-500 sccm, and the MF power is discharged to make the thickness of the NiCr layer to be 18nm to obtain a flexible film.
[0045] The performance of the flexible film was detected according to the ASTM D1003 standar...
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