Multiple-mode interference and optical integration type accelerometer
An accelerometer, multi-mode interference technology, applied in the field of integrated optics, can solve the problems of difficult integration of optical devices, and achieve the effect of easy integration, expansion of application fields, and high sensitivity
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[0018] The present invention will be further explained below in conjunction with the accompanying drawings.
[0019] A multi-mode interference optical integrated accelerometer is characterized in that it includes an ASE broadband light source 1, a circulator 2, an optical fiber link 3, a module to be measured 5, a sensor module and a spectrometer 8;
[0020] The output of the ASE broadband light source 1 is connected to the circulator 2, and the output of the circulator 2 is connected to the optical fiber link 3 and the spectrometer 8; the optical fiber link 3 is connected to the sensor module;
[0021] The sensing device module includes a substrate 7 and an MMI sensing element 6 attached to the cantilever arm 4, one end of the cantilever arm 4 is fixed on the substrate 7, and the other end is connected to the module to be tested 5; the MMI sensing element 6 is composed of A front single-mode fiber 9, a multimode fiber 10 and a rear single-mode fiber 11 are formed; the multimo...
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