A metering type micro-nano step height measuring device

Abstract

The invention discloses a metering type micro-nano step height measuring device, which comprises a support system, a white light microscopic measuring head installed on the support system, a displacement scanning system and a metering system. The beneficial effects of the present invention are: the measuring device for measuring the height of the micro-nano step is mainly used to measure the height of the micro-nano step or the depth of the groove. The system adopts a thick and thin two-stage displacement scanning system. The piezoelectric ceramic-driven nano-stage can realize sub-nanometer stepping within the micron-level scanning range; the piezoelectric ceramic-driven lifting platform can realize sub-micron-level stepping within the millimeter-level scanning range. Progress; Z-direction measurement range up to 200 microns. The micro-interference probe adopts white light source (i.e. white light micro-probe), based on the principle of white light interference, it can achieve a Z-direction resolution of 0.1nm, and at the same time, it can directly obtain the three-dimensional topography of the measured surface. A laser interferometer is used to form a measurement system, and the displacement is directly traced to the wavelength reference defined by the meter in the International System of Units.

Description

technical field [0001] The invention relates to the technical field of measuring the height of micro-nano steps, in particular to a measuring device for measuring the height of micro-nano steps. Background technique [0002] At present, two methods of stylus scanning and microscopic scanning are generally used to measure the depth of nano-grooves, but both of these two measurement methods have certain technical defects, and the specific defects are as follows: [0003] Measured using the stylus scanning method. During measurement, the stylus is in contact with the measured surface and moves linearly along the measured surface, the up and down displacement of the stylus is transmitted to the measuring sensor through the lever mechanism, and the output value of the sensor is the depth of the measured nano-groove or the height of the nano-step . However, the measured profile is the convolution of the stylus and the surface topography of the measured surface, and the topograph...

AI Technical Summary

Problems solved by technology

Although the micro-scanning method can obtain three-dimensional images, its longitudinal displacement comes from the grating ruler, and it still needs to be calibrated before measurement

[0005] To sum up, there is currently no groove depth (step height) measuring instrument that can directly trace the value, has a millimeter-level measurement range, nanometer-level measurement accuracy, and can directly obtain a three-dimensional image.

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