The rotor of a molecular pump
A molecular pump and rotor technology, used in pumps, components of pumping devices for elastic fluids, pump components, etc., can solve problems such as scratches, high tolerances of parts, and difficult assembly, reducing difficulty and optimizing structure. , the effect of reducing the chance of damage
Active Publication Date: 2017-10-24
北京四海祥云流体科技有限公司
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Problems solved by technology
In this scheme of the prior art, since the gap between the stator and the rotor blades cannot be very large, there are strict size requirements during the installation process, the parts tolerance requirements are high, and the assembly is difficult; and because the gap between the stator and the rotor blades is very large Small, if the rotor blades inhale foreign matter or are impacted by the air flow during operation, the rotor blades and the stator will scratch, causing the rotor to be completely damaged
Method used
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[0021] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0022] Embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings, as figure 2 Shown is the front schematic view of the molecular pump rotor provided by the embodiment of the present invention; image 3 Shown is a schematic side view of the molecular pump rotor provided by the embodiment of the present invention, combined with figure 2 and 3 :
[0023] There is no gap between ea...
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The invention discloses a rotor of a molecular pump. Clearance is not left among layers of blades of the rotor; a stator in an original rotor of a molecular pump is removed; the blade layers are connected directly; the extraction efficiency of the layers of the blades of the whole rotor is mutually connected by adjusting extraction speed and compression ratio of different layers of the blades. The rotor blades adopt a turbine-shaped structure that adjacent layers of blades are connected end to end; smooth and continuous curved surfaces are utilized to connect the layers of the rotor blades; difficulty in processing the rotor is greatly reduced by optimizing the structure of the rotor blades; the damage probability of the molecular pump is reduced.
Description
technical field [0001] The invention relates to the technical field of vacuum pumps, in particular to a molecular pump rotor. Background technique [0002] At present, the molecular pump is a vacuum pump used to obtain high vacuum and ultra-high vacuum. It has the advantages of clean and oil-free, high pumping speed, high limit and low energy consumption. Widely used in various laboratory and industrial occasions requiring high vacuum, such as coating, electron microscope, mass spectrometer, semiconductor and solar cell production, monocrystalline silicon and sapphire furnace, etc. The molecular pump is a kind of kinetic energy transmission pump, which transmits kinetic energy to gas molecules through the high-speed rotation of the rotor to realize the ability of pumping gas. [0003] like figure 1 Shown is the structural schematic diagram of conventional molecular pump rotor in the prior art, from figure 1 It can be seen from the figure that the blades on the upper part ...
Claims
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IPC IPC(8): F04D29/32F04D29/38
CPCF04D29/32F04D29/388
Inventor 董欣郁晋军朱秀明
Owner 北京四海祥云流体科技有限公司