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A compact electrostatic lens for deflecting and converging ion beams

An electrostatic lens and ion beam technology, which is applied in the field of ion optical systems of mass spectrometers, can solve the problems of installation and positioning difficulties, limit the sensitivity and resolution performance of mass spectrometers, increase the number of high-voltage power supply modules, etc., achieve compact structure, reduce ion transmission loss, and volume small effect

Active Publication Date: 2017-02-15
DALIAN INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this is a method of discrete components, which increases the volume of the ion transmission system, and makes installation and positioning difficult, limiting the sensitivity and resolution of the mass spectrometer
Also increased the number of high voltage power modules

Method used

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  • A compact electrostatic lens for deflecting and converging ion beams
  • A compact electrostatic lens for deflecting and converging ion beams
  • A compact electrostatic lens for deflecting and converging ion beams

Examples

Experimental program
Comparison scheme
Effect test

Embodiment

[0026] A Xe ion beam with an energy of 3KeV passes through the diaphragm 2 with an aperture of 5mm, enters the upper and lower deflection electrode groups with a through hole of 15mm in the third, and produces a convergence effect while deflecting, and finally passes through the shield with an aperture of 15mm. Electrode exits. The deflection voltage is 150V and the convergence potential is -2650V. The ion beam deflection angle is 1.9°, and the focusing plane is located on the detector 3.2m away. Finally, the spot size of the control ion beam is selected to be about 1 mm. The length of the diaphragm, the main lens electrode group and the shielding electrode are all selected at 20mm, and the interval is 2mm. Wherein the upper and lower deflection electrodes of the main lens electrode are separated by 2mm by the three-dimensional positioning insulating component. The entire system requires 2 power modules.

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Abstract

The invention relates to an ion optical system for realizing deflection and convergence of ion beams in mass spectrometry, in particular to an ion optics lens for adjusting the deflection angle and radial convergence of ion beams by using an electrostatic field. The lens is small in size and compact in structure. It includes the main lens electrode assembly and the three-dimensional positioning insulation assembly. Different voltages are applied in sequence; the ion beam starts to move along the axis of the lens. The radial direction produces convergence. The angle of deflection can be adjusted by the voltage difference of the main lens electrodes, and the focus of convergence can be adjusted by the potential of the main lens. The compact electrostatic lens system for deflecting and converging ion beams involved in the present invention uses as few power modules as possible to realize the control of the deflection angle of the ion beams and the converging plane, and reduce the loss of ion transmission.

Description

technical field [0001] The invention relates to an ion optical system of a mass spectrometer, in particular to a compact electrostatic lens for deflecting and converging ion beams. The invention is suitable for controlling the deflection of ion beams to a proper angle through an electric field under vacuum conditions, and can converge the ion beams in the radial direction to reduce ion transmission loss. The whole system is characterized by compact structure and small volume. Background technique [0002] It is a widely used method to adjust ion beam deflection and convergence by electric field (potential). In mass spectrometry, it is common to use this method to achieve ion beams of different incident energies entering mirrors or detectors at reasonable deflection angles. In order to increase the receiving solid angle of the larger diverging ion beam, a converging lens system is often added in the mass spectrometer to focus the ion beam on a specific focal plane. The cla...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01J37/12H01J37/317
CPCH01J37/12H01J37/317
Inventor 李海洋陈平花磊谢园园蒋吉春刘巍
Owner DALIAN INST OF CHEM PHYSICS CHINESE ACAD OF SCI