Device and method for measuring coaxiality
A coaxiality and detected technology, applied in the field of coaxiality measuring devices
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[0027] Example 1
[0028] Such as figure 1 As shown, a device for measuring coaxiality includes a light source 1, and a dichroic prism 2 placed on the exit surface of the light source 1. A lens 3, a dichroic prism 2 5, and a dichroic prism 2 are sequentially arranged below the dichroic prism 1 There is a detected axis 6 under the second 5, a plane mirror 7 placed at an angle of 45° is provided on the left side of the dichroic prism 2, and a detected axis 8 is provided under the plane mirror 7; The CCD detector 9 is electrically connected to the processor 10, and the processor 10 is electrically connected to the computer 11. The CCD detector adopted by the invention has high quantum detection efficiency, high spatial resolution, high density resolution, high dynamic range, can obtain the best image, long-term reliable and consistent image quality, and greatly reduces the use cost.
Example Embodiment
[0029] Example 2
[0030] On the basis of Example 1,
[0031] The light source 1 of the present invention is a semiconductor laser point light source, which has the characteristics of clarity, good consistency, and long service life; the lens one 3 and the lens two 4 are convex lenses; the dichroic prism 2 and the dichroic prism The second prism 5 is a polarization beam splitting prism with a high extinction ratio.
[0032] Such as figure 2 As shown, a method for measuring coaxiality includes the following steps:
[0033] 1) Set up the light path, set the light source at the focal point of lens 1, so that the light beam emitted by the light source passes through the dichroic prism 1 and lens 1 to form a parallel beam; when lens 1 and lens 2 are set, the focal position coincides; the parallel beams converge after passing through lens 2. , And then pass through the second beam splitter prism to reach the first axis, the first axis is set at the focal plane of the second lens; the pa...
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