Method of manufacturing organic light emitting display device
A light-emitting display, organic technology, applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc.
Active Publication Date: 2017-03-22
DONGWOO FINE CHEM CO LTD
View PDF7 Cites 0 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
However, this patent does not fundamentally solve the above-mentioned problems
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment
[0078] Examples and Comparative Examples
[0079] (1) Preparation of etchant composition
[0080] Etchant compositions having various constituent components and contents listed in Table 1 below and including the balance of water were prepared.
[0081] [Table 1]
[0082]
[0083] (2) Formation of metal wires
[0084] 1) Gate electrode
[0085] A Mo / Al / Mo metal layer is formed on a glass substrate by a deposition method, and the formed layer metal layer is etched using each of the above-mentioned etchant compositions to form a gate electrode.
[0086] 2) The first electrode
[0087] A gate electrode, a source electrode, and a drain electrode are formed on the glass substrate, and then a passivation layer is formed on the glass substrate. Thereafter, a laminated layer structure of ITO / APC(AgPdCu) / ITO was formed on the passivation layer, and then etched using the respective etchant compositions described above to form the first electrode. Here, the drain electrode and the ...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
| Property | Measurement | Unit |
|---|---|---|
| electrical resistivity | aaaaa | aaaaa |
Login to View More
Abstract
The invention discloses a method for manufacturing an organic light-emitting display device: a) forming a gate electrode on a substrate; b) forming a gate insulating layer on the substrate including the gate electrode; c) forming an active layer on the gate insulating layer; forming an insulating layer on the source layer; e) forming a source electrode and a drain electrode in contact with the active layer on the insulating layer; f) forming a passivation layer on the insulating layer to cover the source electrode and the drain electrode; An organic light-emitting element in which one of the electrode and the drain electrode is electrically connected, wherein step a) includes forming a metal layer of aluminum, molybdenum or silver, or a laminated layer thereof, etching the metal layer with an etchant composition to form a gate electrode, and the etchant composition The material includes 50% to 70% by weight of phosphoric acid, 2% to 15% of nitric acid, 5% to 20% of acetic acid, 0.1% to 5% of p-toluenesulfonic acid and the balance of water, therefore, can be simultaneously Etching the metal layer forming the gate electrode and the pixel electrode achieves an excellent etching effect and manufactures an organic light emitting display device with improved process efficiency.
Description
technical field [0001] The invention relates to a method for manufacturing an organic light emitting display device. Background technique [0002] In general, flat panel display devices can be classified into light emitting type devices and light receiving type devices. Light emitting devices may include, for example, cathode ray tubes, plasma display panels, electroluminescent devices, light emitting diodes, and the like. The light-receiving type device may include, for example, a liquid crystal display. Among these, the electroluminescent device has several advantages such as a wide viewing angle, excellent contrast ratio, and high response speed, and thus, it has attracted public attention as a next-generation display device. [0003] Such electroluminescent devices are classified into inorganic electroluminescent devices and organic electroluminescent devices according to the material forming the light emitting layer. [0004] Among these, the organic electroluminesce...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Patents(China)
IPC IPC(8): H01L51/56H01L27/32
CPCH10K99/00H10K71/60H10K59/12H10K71/00H01L29/4908H01L21/32134C23F1/16
Inventor 张尚勋金泰完沈庆辅
Owner DONGWOO FINE CHEM CO LTD