Method and system for measuring normal-tracking aspheric surfaces based on multi-wavelength laser interference
A technology of laser interference and laser interferometer, which is applied in the field of ultra-precision and high-speed interferometry, can solve difficult problems such as measurement, achieve the effect of improving measurement efficiency, improving measurement accuracy, and eliminating Abbe error
Inactive Publication Date: 2017-09-12
NAT INST OF METROLOGY CHINA
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This method not only has the characteristics of good vertical resolution and horizontal resolution, but also has good depth response characteristics, high light intensity contrast, and strong anti-scattered light ability; but for surfaces with high numerical aperture or large curvature changes, due to the detection The system cannot collect enough return light, so it is difficult to measure its surface
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[0023] The examples of the present invention will be described in detail below in conjunction with the accompanying drawings.
[0024] A normal-tracking aspheric measurement system based on multi-wavelength laser interference, its structure is as follows figure 1 As shown, it is characterized in that the system includes X-guiding rail 1, Z-guiding rail 2, rotating mechanism 3, multi-wavelength interference measuring head 4, measured aspheric surface 5, rotary table 6, Z-directing laser interferometer 7, X to the laser interferometer 8; wherein, the X-guiding rail 1 and the Z-guiding rail 2 are installed perpendicular to each other, which can realize scanning in the XZ plane, and the multi-wavelength interferometric probe 4 is fixed on the end of the Z-guiding rail 2 through the rotating mechanism 3, which can realize The rotational movement of the multi-wavelength interference measuring head 4, the Z-direction laser interferometer 7 and the X-direction laser interferometer 8 a...
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The method and system for normal tracking aspheric surface measurement based on multi-wavelength laser interference belong to the technical field of surface topography measurement; the invention comprises three parts: a scanning mechanism, a multi-wavelength laser interference probe and a rotary workpiece table, and the measured aspheric surface is placed on the rotary surface. On the workpiece table, the scanning mechanism adopts X-direction guide rail and Z-direction guide rail to realize scanning in the XZ plane. The multi-wavelength laser interference probe is fixed at the end of the Z-direction guide rail through the rotating mechanism. The probe adopts multi-wavelength interference technology and can perform absolute distance measurement. , to directly measure the shape of the step while retaining the characteristics of high precision and traceability of the interferometric measurement; the probe uses a position sensor to measure the slope change of the measured aspheric surface and adjust the rotating mechanism in real time, so that the probe and the measured aspheric surface can be adjusted in real time. The surface is always kept vertical to ensure that the probe receives enough light signals; therefore, the present invention can realize ultra-precise and fast measurement of the surface shape of aspherical elements with large diameter, high numerical aperture, large curvature and step features.
Description
technical field [0001] The method and system for measuring the normal-tracking aspheric surface based on multi-wavelength laser interference belongs to the technical field of surface topography, and in particular relates to an ultra-precise measurement method for the surface shape of aspheric components with high numerical aperture, large curvature and step features. , High-speed interferometry method and system. Background technique [0002] Since the aspheric surface has more degrees of freedom in design, the optical system has greater flexibility, can correct aberrations, improve image quality, expand the field of view, and simplify the structure and weight of the optical system. Therefore, in modern optical systems It has been widely used, especially in high-end technical fields such as astronomical telescopes, deep ultraviolet lithography, laser weapon optical systems, laser nuclear fusion optical systems, and optical imaging guidance systems for guided missiles. At pr...
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IPC IPC(8): G01B11/24
Inventor 刁晓飞薛梓康岩辉
Owner NAT INST OF METROLOGY CHINA