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Non-volatile field effect transistor storage device without floating gate

A non-volatile, field effect transistor technology, applied in the field of storage, can solve the problems of destroying the insulation degree of the insulating layer, slow erasing and writing speed, serious leakage of the insulating layer, etc., to simplify the device preparation process, improve the erasing and writing speed, and simple structure. Effect

Inactive Publication Date: 2015-09-16
SUN YAT SEN UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, this method of hot electron injection and release requires high voltages to be applied to the gate and channel layers, which will destroy the insulation of the insulating layer.
Therefore, the number of erasing and writing of flash memory is limited, and the erasing and writing speed is slow. After a certain number of erasing and writing, the leakage of the insulating layer becomes serious, and the charge cannot be effectively stored, so that the device can no longer work normally.

Method used

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  • Non-volatile field effect transistor storage device without floating gate
  • Non-volatile field effect transistor storage device without floating gate
  • Non-volatile field effect transistor storage device without floating gate

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Embodiment 1

[0028] like figure 1 and figure 2 As shown, a non-volatile non-floating gate transistor field effect transistor memory of the present invention specifically includes SrTiO 3 Substrate 1, set on SrTiO 3 LaAlO on substrate 1 3 Thin film 2 and were set on SrTiO 3 on substrate 1 and through the LaAlO 3 The two metal electrodes 3, 4 of the film 2, the two metal electrodes 3, 4 are respectively used as the source S and the drain D, LaAlO 3 The metal electrode 5 as the gate G is arranged on the film 2, SrTiO 3 Substrate 1 with LaAlO 3 A two-dimensional electron gas 6 is formed between the interfaces of the thin films 2 .

[0029] Wherein, the metal electrodes serving as the source S, the drain D and the gate G are all platinum electrodes.

[0030] The structural expression of the memory realized by the present invention is: Pt / LaAlO 3 / SrTiO 3 , whose insulating LaAlO 3 The thin film has the functions of the insulating layer and the floating gate layer in the structure of...

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Abstract

The invention relates to the technical field of storage, in particular to non-volatile field effect transistor storage device without a floating gate. The non-volatile field effect transistor storage device comprises a SrTiO3 substrate, a LaAlO3 thin film arranged on the SrTiO3 substrate and two metal electrodes which are arranged on the SrTiO3 substrate and pass through the LaAlO3 thin film respectively, wherein the two metal electrodes serve as a source electrode S and a drain electrode D respectively; a metal electrode as a grid electrode is arranged on the LaAlO3 thin film; and two-dimensional electron gas is formed between the interface of the SrTiO3 substrate and the LaAlO3 thin film. The LaAlO3 thin film has the functions of an insulating layer and a floating gate layer in a flash memory device structure, the floating gate layer for storing electric charges does not need to be used, the structure is simpler, the device preparation technology is simpler, and the erasing speed can be greatly improved.

Description

technical field [0001] The invention relates to the field of storage technology, in particular to a non-volatile non-floating gate transistor field effect transistor memory. Background technique [0002] Non-volatile memory has the advantage that the logic data stored in the device can still be stored for a long time when there is no power supply. It is one of the most important hardware in digital information technology and has attracted the attention of scholars and enterprises. [0003] At present, the mainstream non-volatile memory in the market is flash memory based on the charge storage mechanism. non-volatile storage. However, this way of injecting and releasing hot electrons needs to apply a high voltage to the gate and channel layers, which will destroy the insulation degree of the insulating layer. Therefore, the number of erasing and writing times of flash memory is limited, and the erasing and writing speed is slow. After a certain number of erasing and writing...

Claims

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Application Information

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IPC IPC(8): H01L27/115
CPCH10B69/00
Inventor 罗艺青吴曙翔李树玮
Owner SUN YAT SEN UNIV