Cutting tools made of cubic boron nitride based ultra-high pressure sintered materials
A cubic boron nitride, boron nitride-based technology, applied in manufacturing tools, turning equipment, metal processing equipment, etc., can solve problems such as inability to obtain dense and high-hardness sintered bodies, shortened life, and shortened tool life.
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[0052] Al 2 o 3 Fabrication of film-coated cBN particle powders:
[0053] Using cBN particles having a median diameter (D50) shown in Table 1 as a substrate, the cBN particles were coated with Al having an average film thickness shown in Table 1 by the ALD (Atomic Layer Deposition) method. 2 o 3 membrane. More specifically, cBN particles having a median diameter (D50) shown in Table 1 were loaded into the furnace, and the temperature in the furnace was raised to 350°C, using Al(CH 3 ) 3 gas as film-forming gas, and H 2 O gas is used as the reaction gas, and the following (1) to (4) are regarded as one cycle, and this cycle is repeated until the target film thickness is reached, thereby forming Al with a predetermined film thickness on the surface of cBN particles. 2 o 3 membrane.
[0054] (1)Ar+Al(CH 3 ) 3 Gas inflow process
[0055] (2) Ar gas purging process
[0056] (3)Ar+H 2 O gas inflow process
[0057] (4) Ar gas purging process
[0058] In addition, for A...
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