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Fast cooling reel-to-reel plasma enhanced CVD (chemical vapor deposition) continuous growth furnace

A plasma and rapid cooling technology, used in gaseous chemical plating, metal material coating process, coating and other directions, can solve the problem of not being able to quickly cool

Inactive Publication Date: 2015-10-21
ANHUI BEQ EQUIP TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The purpose of the present invention is to provide a rapid cooling roll-to-roll plasma enhanced CVD continuous growth furnace, which solves the technical problem that the prior art cannot rapidly cool and continuously prepare large-area, high-quality graphene

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  • Fast cooling reel-to-reel plasma enhanced CVD (chemical vapor deposition) continuous growth furnace

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Embodiment Construction

[0018] see figure 1 The specific embodiment of the present invention adopts the following technical solutions: it includes a CVD tube furnace 6, and the two ends of the furnace tube of the CVD tube furnace 6 are respectively equipped with a feed intake vacuum chamber 1 and a discharge exhaust vacuum chamber In the vacuum chamber, unwinding rollers 3 and winding rollers 8 are correspondingly installed, and a radio frequency plasma generator 4 is installed between the feeding inlet chamber 1 and the furnace body, and the discharging and exhausting A liquid nitrogen cold trap 7 is installed between the cavity and the body of furnace; the feed and intake vacuum chamber 1 is connected to the gas supply system 10; a vacuum rotating motor is also installed in the discharge and exhaust vacuum chamber; The material exhaust vacuum chamber is connected with a vacuum unit 13 with a vacuum valve 9; the vacuum chamber can be opened, and it is made of metal material; the radio frequency plas...

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Abstract

The invention discloses a fast cooling reel-to-reel plasma enhanced CVD (chemical vapor deposition) continuous growth furnace, and relates to the technical field of graphene growth CVD equipment. The fast cooling reel-to-reel plasma enhanced CVD continuous growth furnace comprises a CVD tubular furnace, wherein the two ends of a furnace pipe of the CVD tubular furnace are respectively provided with a feeding air inlet vacuum cavity and a discharging exhaust vacuum cavity; an unreeling roller and a reeling roller are respectively and correspondingly arranged in the vacuum cavities; a radio frequency plasma generator is arranged between the feeding air inlet cavity and the furnace body; a liquid nitrogen cold trap is arranged between the discharging exhaust cavity and the furnace body. The fast cooling reel-to-reel plasma enhanced CVD continuous growth furnace is used for preparing graphene. Compared with the prior art, the fast cooling reel-to-reel plasma enhanced CVD continuous growth furnace has the advantages of fast cooling and continuous growth. The large-area high-quality graphene scale growth can be realized.

Description

technical field [0001] The invention relates to the technical field of graphene growth CVD equipment, in particular to a rapid cooling roll-to-roll plasma enhanced CVD continuous growth furnace. Background technique [0002] Graphene is a new material with a single-layer sheet structure composed of carbon atoms. It is a planar film composed of carbon atoms in a hexagonal honeycomb lattice with sp2 hybrid orbitals. It is a two-dimensional film with a thickness of only one carbon atom. Material. Due to the special chemical structure of graphene, it has very excellent properties in mechanics, heat, optics, electricity, etc., which also makes it have broad application prospects in the fields of display, energy, detection, and optoelectronics. The application and development of graphene It will also bring revolutionary changes to many research fields. [0003] CVD (Chemical Vapor Aeposition, Chemical Vapor Deposition) refers to the process of introducing gaseous reactants or li...

Claims

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Application Information

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IPC IPC(8): C23C16/513C23C16/26
Inventor 孔令杰李晓丽吴克松
Owner ANHUI BEQ EQUIP TECH
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