Discharge ionization current detector
一种放电离子化、电流检测器的技术,应用在仪器、测量装置、科学仪器等方向,能够解决难燃性气体灵敏度低、没有无机气体灵敏度等问题,达到良好测定结果、防止SN比的降低的效果
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[0057] Below, while referring to the attached Figure 1 Embodiments of the present invention will be described.
[0058] figure 1 It is a schematic configuration diagram of the discharge ionization current detector according to the first embodiment of the present invention, and shows a cross section of the discharge ionization current detector 10 which is made into a cylindrical shape. The discharge ionization current detector 10 is mainly composed of a plasma generation unit 20 and an ion collection unit 30 .
[0059] A gas introduction port 23 is provided above the plasma generating unit 20 , and a cylindrical tube 21 made of a dielectric such as synthetic quartz is provided below the plasma generating unit 20 . An electrode 22 for plasma generation is arranged outside the cylindrical tube 21 , and a low-frequency AC power supply 24 is connected to the electrode 22 . The voltage and frequency of the AC power supply 24 can be controlled by the controller 25 .
[0060] On ...
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