Device for drawing monocrystalline silicon downward and drawing method
A technology of monocrystalline silicon and manufacturing method, which is applied in the direction of single crystal growth, self-melting liquid pulling method, crystal growth, etc., can solve the problems of expensive equipment, difficult process control, high production cost, etc., achieve low price, reduce melting Silicon time, the effect of eliminating oxygen pollution
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0055] specific implementation
[0056] The device of the present invention is composed of a silicon melter (2+6), a main heater (1), a crystallizer (4), a seeder (11) and the like.
[0057] The drawing method of the present invention is: continuous feeding of molten silicon--continuous crystallization in the crystallizer--continuously generated crystal rods--continuously drawn downward under the support of the crystal holder.
[0058] Solid silicon is melted into liquid silicon (4) in the silicon melter, and after the upper surface of the single crystal seed substrate (9) on the crystal tray (11) in the crystallizer (6) is melted, the liquid silicon flows into In the crystallizer (6), the main heater (1) continues to precisely control the temperature of the liquid silicon (7) by means of radiation heat exchange, the liquid silicon is recrystallized on the seed crystal substrate (9), and the resulting ingot ( 8) Draw out continuously downwards from the crystal holder (11) bel...
PUM
Login to View More Abstract
Description
Claims
Application Information
Login to View More 