Independent-type multi-source confocal ultrasonic atomization pyrolysis spraying reaction chamber

Abstract

The invention discloses an independent-type multi-source confocal ultrasonic atomization pyrolysis spraying reaction chamber. A sample bearing table is arranged in the reaction chamber, a heating body shell is arranged on the upper portion of the sample bearing table, and heating bodies are arranged in the heating body shell; at least two atomization sources are mutually independent and are arranged in the circumferential direction of the reaction chamber, and a spraying nozzle on the upper portion of each atomization source is connected with a spraying pipe; the upper portions of the spraying pipes both face the axis line of the reaction chamber and both form a spraying angle alpha with the axis line of the reaction chamber; and a nozzle at the upper portion of each spraying pipe is provided with a baffle, and the baffles can block or open the spraying nozzles at the upper ends of the corresponding spraying pipes. By means of the independent-type multi-source confocal ultrasonic atomization pyrolysis spraying reaction chamber, a thin film containing required components can be obtained, and the defect of cross contamination caused by a traditional structure is overcome; and high-temperature reaction tail gas near the sample bearing table is hooded through a tail gas pumping hood, heat reflection can be achieved through a heat reflection hood, and cooling is further achieved through a water-cooling heat shield plate.

Description

technical field [0001] The invention belongs to the field of ultrasonic atomization pyrolysis spraying film material preparation, in particular to an independent multi-source confocal ultrasonic atomization pyrolysis spraying reaction chamber. Background technique [0002] Ultrasonic atomization pyrolytic spraying (USP for short) is a common thin film material preparation process, which is widely used in scientific research and production. This method is good at the preparation of compound thin films such as oxides, sulfides, and chlorides. Under reasonable process parameters, the quality of USP film can be comparable to that of film materials prepared by sputtering and CVD methods, but the cost is greatly reduced. [0003] Doped thin films and multilayer thin films are very common in the research and production of thin film materials. The traditional USP method has certain problems in the preparation of doped and multilayer films. The main problem is that there is only one ...

AI Technical Summary

Problems solved by technology

[0007] The technical problem to be solved by the present invention is to provide a self-contained multi-source confocal ultrasonic atomization pyrolysis spraying reaction chamber to overcome the defects of the traditional single atomization source that is easy to cross-contaminate, poor repeatability of process parameters, and uncontrollable film composition

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