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Extrinsic fiber optic FAP acoustic pressure sensor and processing method based on 45° optical fiber

A sound pressure sensor, extrinsic technology, applied to instruments, measuring ultrasonic/sonic/infrasonic waves, measuring devices, etc., can solve the problems of poor stability of coaxial extrinsic optical fiber FPC cavity sound pressure sensors, etc., to achieve Effect of size reduction and cavity length reduction

Active Publication Date: 2017-11-14
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0009] In view of the above problems, the present invention discloses an extrinsic optical fiber FAP sound pressure sensor based on a 45° optical fiber, and discloses the processing method of the sensor. The sound pressure sensor can not only meet the requirements of being attached to the surface of the measured object technical requirements, and can solve the problem of poor stability of the coaxial extrinsic fiber optic FAPP cavity sound pressure sensor

Method used

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  • Extrinsic fiber optic FAP acoustic pressure sensor and processing method based on 45° optical fiber
  • Extrinsic fiber optic FAP acoustic pressure sensor and processing method based on 45° optical fiber

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specific Embodiment 1

[0035] This embodiment is a device embodiment of an extrinsic fiber optic FAP acoustic pressure sensor based on a 45° optical fiber.

[0036] The extrinsic fiber-optic fiber-optic acoustic pressure sensor based on the 45° optical fiber of the present embodiment has a structural schematic diagram as figure 1 shown. The sensor includes a silicon support structure 1, an optical fiber 2 with a polished end face of 45° inserted from the side of the silicon support structure 1 against the bottom, a sound pressure sensitive film 3 arranged on the top of the silicon support structure 1, and the silicon support structure 1 The sound pressure sensitive film 3 forms a enamel cavity; the sound pressure sensitive film 3 is a silver film, and the ratio of the diameter of the inscribed circle of the silver film to the thickness is greater than 1000.

specific Embodiment 2

[0037] This embodiment is a device embodiment of an extrinsic fiber optic FAP acoustic pressure sensor based on a 45° optical fiber.

[0038] The extrinsic optical fiber FAP acoustic pressure sensor based on 45° optical fiber in this embodiment is further limited on the basis of the specific embodiment 1 that the thickness of the sound pressure sensitive film 3 is less than 1 micron, and the diameter of the inscribed circle is greater than 1000 microns.

specific Embodiment 3

[0039] This embodiment is an embodiment of a processing method for an extrinsic fiber optic FAP acoustic pressure sensor based on a 45° optical fiber.

[0040] The processing method of the extrinsic fiber optic fiber-optic acoustic pressure sensor based on the 45° optical fiber of the present embodiment, the process flow chart is as follows figure 2 shown. The method includes the following steps:

[0041] Step a, processing the silicon support structure 1 provided with the optical fiber socket;

[0042] Step b, spin coating a positive photoresist 5 on the upper surface of the base 4, and deposit a sound pressure sensitive thin film 3 on the upper surface of the positive photoresist 5 by electron beam deposition, thermal evaporation or magnetron sputtering;

[0043] The steps a and b are carried out synchronously or in any order;

[0044] Step c, pasting the top of the silicon support structure 1 and the sound pressure sensitive film 3 together;

[0045] Step d, using a so...

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Abstract

The present invention is based on 45° fiber-optic extrinsic fiber optic FAPP sound pressure sensor and its processing method, which belong to the technical field of sound pressure sensor; the sensor includes a silicon support structure and a polished end face inserted from the side of the silicon support structure against the bottom It is a 45° optical fiber, and the sound pressure sensitive film is arranged on the top of the silicon support structure. The silicon support structure and the sound pressure sensitive film form a enamel cavity; the sound pressure sensitive film is a silver film, and the ratio of the diameter of the inscribed circle of the silver film to the thickness is greater than 1000; the processing method first processes the silicon support structure, and sequentially spin-coats a positive photoresist on the upper surface of the base, deposits a sound pressure sensitive film, and then pastes the top of the silicon support structure with the sound pressure sensitive film, and then dissolves the positive photoresist. Finally, the optical fiber is inserted and adjusted from the optical fiber socket, and then the optical fiber socket is sealed; the present invention can not only meet the technical requirements for use on the surface of the measured object, but also solve the problem of coaxial extrinsic optical fiber Poor stability of the Po cavity acoustic pressure sensor.

Description

technical field [0001] The invention relates to an extrinsic optical fiber FAP acoustic pressure sensor and a processing method based on a 45° optical fiber, belonging to the technical field of acoustic pressure sensors. Background technique [0002] Due to the advantages of small size, light weight, high sensitivity, and no electrical interference, the extrinsic fiber optic fiber cavity pressure sensor has been developed rapidly. So far, extrinsic fiber optic FAP cavity pressure sensors have been widely used in aerospace, military ships, biomedicine, construction and other fields. [0003] The extrinsic fiber optic FAP cavity pressure sensor usually consists of an optical fiber end face and a thin film. The thin film vibrates under the action of external pressure, causing the cavity length of the FAP cavity to change, resulting in changes in the reflectivity of the FAP cavity. Based on this principle, the external pressure can be obtained by measuring the change of the ref...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01H9/00
Inventor 金鹏刘彬刘欢王健
Owner HARBIN INST OF TECH