Apparatus and methods for defining a plasma

A technology of plasma and equipment, applied in the field of plasma, can solve problems such as unsuitable substrates

Active Publication Date: 2015-11-18
CAMVAC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, this coating system may not be suitable for appl

Method used

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  • Apparatus and methods for defining a plasma
  • Apparatus and methods for defining a plasma
  • Apparatus and methods for defining a plasma

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[0114] figure 1 The device shown is placed in the vacuum chamber 1, and the coated substrate 2 to be processed is supplied to the guide located between the coated substrate unfolding (not shown) and the coated substrate rewinding chamber (not shown). On the idle guide rollers 3, 7, the coated substrate 2 passes through the coating chamber 4 during the feeding process, and the coating chamber is formed by an outer packaging body 4', and the outer packaging body 4'is arranged to produce radiation curing The radiation curing material directional beam generating device 5 of the material directional beam 5', and the low-pressure gas plasma source 6 for generating the directional ion current 6'. The directional ion flow can include cations and other positively charged or uncharged particles and species, but only these positively charged ions are the main initiators of the curing or treatment process. The ionization fraction of a typical plasma can be 10 -5 To 10 -1 between. When the...

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Abstract

Apparatus comprising: a support 3, 7 arranged to transport a moving substrate 2, a plasma generator 6 arranged to generate plasma 6 and an electrode arranged to bias ions within the plasma towards the moving substrate 2 to form an ion flux. The ion flux has an energy level between 3.6eV and 250eV. The ion flux is used to cure radiation curable material on the moving substrate 2. Apparatus for defining plasma having a plurality of spaced race track portions using magnetic arrays is also disclosed (Fig. 9).

Description

technical field [0001] The invention relates to the field of plasma technology, in particular to a method and equipment for generating plasma. Background technique [0002] Coating relevant layers of cured polymers, metals or metal mixtures on coated substrates by coating processes such as vacuum coating processes can be made into films with enhanced barrier properties to oxygen or other gases, odors, and water vapor. These films are used in oxygen- or moisture-sensitive food packaging, encapsulation of gas- or moisture-sensitive components, and a variety of other functional applications requiring barrier properties. [0003] It is known to apply a cured polymer layer to the surface of a coated substrate by a vacuum plating process. However, both the known vacuum condensation process and the polymer precursor solidification process have a number of drawbacks / risks related to impurities in the raw materials used, especially commercial grades of raw materials used for the sub...

Claims

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Application Information

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IPC IPC(8): H01J37/32B05D3/06
CPCH01J37/32752B05D1/62B05D2252/02H01J37/32422H01J2237/3382Y02P20/582C08F2/46C08F2/52C08F2/54H01J37/32009H05H1/00H01J37/32H01J37/32403H01J37/32532H01J37/3266H01J37/3277H01J37/32036H01J37/32669H01J37/32715
Inventor 大卫·安东尼约翰·托平
Owner CAMVAC
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