Long-stroke single degree of freedom air-bearing magnetic-drive nano-positioning platform

Abstract

The invention discloses a long-stroke single degree of freedom air-bearing magnetic-drive nano-positioning platform, which comprises a solenoid actuator, an air-bearing guide mechanism, a position sensor module and an eddy current retarder module. The solenoid actuator body consists of two parts of a stator and a rotor; the rotor part is provided with a permanent magnet array; the stator three-phase winding adopts a coreless structure. Degree of freedom in five directions of a positioning platform is constrained by the air-bearing guide mechanism through three air bearings in vertical direction and two lateral air bearings in horizontal direction, so as to enable the positioning platform to perform motion only along one direction. The position sensor module is realized by virtue of a high-precision raster rule. The eddy current retarder module comprises two eddy current retarders which are respectively arranged at the front end and the rear end of the solenoid actuator. The nano-positioning platform disclosed by the invention has the advantages of simple structure, direct drive, zero friction, hysteresis-free, haul back interval-free and the like, and nano-grade positioning resolution is reached in motion strokes from tens of millimeters to hundreds of millimeters.

Description

technical field [0001] The invention relates to the field of precision servo drive, in particular to a large-stroke single-degree-of-freedom air-floating magnetically driven nano-positioning platform. Background technique [0002] With the development of nano-manufacturing technology, high-efficiency nano-machining machine tools, nano-laser direct writing lithography machines, and AFM-based large-scanning-range metrology equipment propose a motion positioning platform with sub-nanometer resolution, Nano-level positioning accuracy and high bandwidth requirements. [0003] The invention patents with patent publication numbers 102998899A and 103883849A use the combination of flexible hinges and piezoelectric ceramics to achieve nano-positioning. This direct-drive piezoelectric ceramic actuator has sub-nanometer positioning resolution, but the processing and The measurement range is only a few tens of microns, and even with an amplifying mechanism, the stroke can only reach a f...

AI Technical Summary

Problems solved by technology

[0003] The invention patents with patent publication numbers 102998899A and 103883849A use the combination of flexible hinges and piezoelectric ceramics to achieve nano-positioning. This direct-drive piezoelectric ceramic actuator has sub-nanometer positioning resolution, but the processing and The measurement range is only a few tens of microns, and even with an amplifying mechanism, the stroke can only reach a few hundred microns

The invention patent with the patent publication number 102629122A proposes a macro / micro combination dual-servo motion platform composed of a linear servo motor and a micro motion platform. Limits the bandwidth of the entire platform, reducing the efficiency of nanofabrication and scanning measurements

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