High Diffraction Efficiency Mems Scanning Grating with Integrated Angle Sensor

Abstract

The invention provides a high-diffraction efficiency MEMS (Micro-Electro-Mechanical-System) scanning grating integrated with an angle sensor, which is composed of a grating surface, an electromagnetic driving coil, an electromagnetic sensing coil, torsion beams and a supporting frame, wherein the grating surface, the electromagnetic driving coil, the electromagnetic sensing coil, the torsion beams and the supporting frame are all made on the same off-oriented (111) substrate; and the grating surface, the electromagnetic driving coil and the electromagnetic sensing coil are supported inside the supporting frame via the pair of torsion beams. The grating of the invention is an asymmetric jagged blazed grating, thereby greatly improving the diffraction efficiency of the scanning grating. The electromagnetic driving mode is adopted to drive the MEMS scanning grating, thereby realizing large-angle scanning of the grating under low working voltage. The electromagnetic angle sensor can be integrated at the same time, thereby realizing real-time grating scanning angle measurement. The high-diffraction efficiency MEMS (Micro-Electro-Mechanical-System) scanning grating integrated with the angle sensor can be widely applied to a micro near infrared spectrometer system.

Description

technical field [0001] The invention relates to a MEMS scanning grating, and belongs to the fields of spectral analysis technology and MEMS technology. Background technique [0002] The micro-spectrometer based on MEMS (Micro-Electro-Mechanical-System) technology has the advantages of small size, light weight, low power consumption, fast detection speed, stable performance, integration, batch manufacturing, and relatively low cost. Huge application market and development potential. [0003] The scanning grating based on MEMS technology is the core component of the miniature near-infrared spectrometer. When the spectrometer is in working condition, the mirror surface of the scanning grating rotates at a certain angle. During the rotation process of the mirror surface, the light of different wavelengths is incident on the focusing concave mirror at a certain angle in sequence, and after being focused and imaged by the focusing concave mirror, it passes through the The slit i...

AI Technical Summary

Problems solved by technology

[0007] Aiming at the limitations of existing MEMS scanning gratings, the present invention proposes a new structure of scanning gratings with high diffraction efficiency, integrated electromagnetic angle sensor, and electromagnetic drive based on MEMS technology

Images