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A kind of preparation method of composite material graphite heater for high temperature

A graphite heater and composite material technology, applied in induction heating, ohmic resistance heating, heating element materials, etc., can solve problems such as damage, deterioration of crucibles or heated elements, and achieve the effect of preventing carbon volatilization

Active Publication Date: 2018-04-06
CHINA ELECTRONICS TECH GRP NO 46 RES INST
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  • Claims
  • Application Information

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Problems solved by technology

[0006] The purpose of the present invention is to solve the problem that the graphite heater in the prior art reacts with crucibles made of other materials or heated elements of other materials, resulting in deterioration or damage of the crucible or heated elements, and especially provides a new graphite heater made of composite material preparation method

Method used

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  • A kind of preparation method of composite material graphite heater for high temperature
  • A kind of preparation method of composite material graphite heater for high temperature

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Embodiment

[0020] Example: refer to figure 1 , a method for preparing a composite graphite heater for high temperature is carried out according to the following steps:

[0021] Step 100 (A), graphite heater pretreatment: polishing the inner surface of the graphite heater to make the surface smooth and mirror-like, and then cleaning the inner and outer surfaces.

[0022] Step 110 (B), tantalum foil pretreatment: use a rolling machine to roll the tantalum foil to ensure that the surface of the tantalum foil is smooth, and then pickle and wash the metal foil. In this embodiment, pickling with a concentration of 20% Dilute hydrochloric acid, washed with deionized water to ensure the cleanliness of the metal foil.

[0023] Step 120 (C), attaching the tantalum foil: attaching the tantalum foil to the inner surface of the graphite heater, as far as possible to ensure that the tantalum foil is completely attached, and the tantalum foil does not bulge.

[0024] Step 120 (D), high-temperature he...

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Abstract

The invention discloses a preparation method for a composite material graphite heater used at a high temperature. The method comprises the following steps: (A) pretreatment of a graphite heater; (B) pretreatment of tinsel; (C) attaching of tinsel; and (D) high temperature heat treatment. With the method, the graphite heater is perfectly converted into the metallic carbide-graphite composite material graphite heater. The composite material graphite heater retains the heating function of the graphite heater, has the high temperature corrosion resistance of metallic carbide, realizes physical isolation of graphite from an internal to-be-heated element and eradicates volatilization of carbon on the inner surface of graphite. The method overcomes problems like fragmentation, bubbling and incapability of intact bonding due to direct carbonization of the tinsel in an inert atmosphere, e.g., argon, helium and vacuum.

Description

technical field [0001] The invention relates to a preparation method of a graphite heater used in a high-temperature heating process, in particular to a preparation method of a composite graphite heater for high temperature. Background technique [0002] Graphite is a crystalline carbon with a melting point of 3652°C and a boiling point of 4827°C. It is chemically inactive, corrosion-resistant, and unsuitable for reacting with acids and alkalis. High-purity graphite has the advantages of high strength, good thermal shock resistance, high temperature resistance, oxidation resistance, small resistivity, corrosion resistance, and easy precision processing. High-purity graphite can be used to process electric heating elements, heaters for single crystal furnaces, crucibles for smelting and semiconductors. [0003] When graphite is used as a heating body, there are generally two heating methods, namely resistance type and electromagnetic induction type. Using pure graphite alon...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C04B41/85H05B3/14H05B6/02
CPCC04B41/009C04B41/85H05B3/145H05B6/02H05B2203/013H05B2206/02C04B35/522C04B41/4519C04B41/4556
Inventor 齐海涛张丽史月增孟大磊窦瑛张皓张政徐所成赖占平
Owner CHINA ELECTRONICS TECH GRP NO 46 RES INST
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