Electromagnetic heating high vacuum oil diffusion pump

Abstract

The invention relates to a high vacuum oil diffusion pump, in particular to an electromagnetic heating high vacuum oil diffusion pump. According to the electromagnetic heating high vacuum oil diffusion pump, an electromagnetic heater is arranged on the bottom of a pump body; a water-cooling oil blocking device is arranged on the exhaust port of the pump body; a straight cavity structure is adopted by the pump body; a water channel type cooling jacket is arranged outside the pump body; a pump core assembly is vertically mounted at the center position inside the pump body; the pump core assembly structurally comprises an umbrella-shaped first-stage nozzle cap, an umbrella-shaped second-stage nozzle cap, a umbrella-shaped third-stage nozzle cap and a third-stage flow guide pipe from inside to outside in sequence to form a whole structure; flow guide pipes are respectively arranged on all umbrella-shaped nozzle caps; a first-stage diffusion flow guide pipe is vertically welded at the internal center position of the third-stage flow guide pipe; the first-stage flow guide pipe is higher than a second-stage flow guide pipe; and the second-stage flow guide pipe is higher than the third-stage flow guide pipe. The electromagnetic heating high vacuum oil diffusion pump has the characteristics that the heating speed is rapid; the cooling speed is rapid; the effect is good; the oil return rate is low; the ultimate vacuum is high; the exhausting rate is high; the electricity consumption is low; and the time to reach ultimate vacuum is short.

Description

technical field [0001] The invention relates to a high vacuum oil diffusion pump, in particular to an electromagnetic heating high vacuum oil diffusion pump, which is suitable for vacuum sintering, vacuum heat treatment and coating equipment. Background technique [0002] High vacuum oil diffusion pump is a kind of jet vacuum pump, it works in the high vacuum area, with low pressure and high speed oil vapor as the working medium. The pumping process of the pump is a process in which the pumped gas diffuses into the oil vapor jet and is carried to the pump outlet for removal. It is composed of pump body, pump core assembly, heater and other components. The pump body is mostly made of carbon steel or stainless steel; the pump core assembly is composed of a nozzle and a guide tube, and the pump core assembly is a key component of a high vacuum oil diffusion pump; the heater is composed of a heating element and an electric control box. In addition to being widely used in gener...

AI Technical Summary

Problems solved by technology

At present, there are no water-cooled tank-type cooling diffusion pumps on the market. Due to the traditional technical structure and manufacturing difficulties, it is impossible to produce water-cooled tank-type high-vacuum oil diffusion pumps, which limits its production, processing and manufacturing.

The pumping speed of the traditional high vacuum oil diffusion pump is small, the original pumping rate can only reach 8500L / S at most, the ultimate vacuum is low, and the ultimate vacuum degree is up to 7×10 -5 Pa, it takes a long time to reach the ultimate vacuum, the oil return rate is high, and the power consumption is large

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