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Wavelength correction type multi-beam cascaded step angle reflecting mirror laser interferometer and measurement method thereof

A technology of laser interferometer and corner reflector, which is applied in measuring devices, instruments, optical devices, etc., can solve the problems of difficulty in improving measurement accuracy and limited measurement accuracy

Active Publication Date: 2016-03-02
CHENGDU UNIV OF INFORMATION TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to overcome the shortcomings of existing laser interferometers that the measurement accuracy is limited by the laser wavelength and the measurement accuracy is difficult to improve, and to provide a wavelength-corrected multi-beam cascaded step-angle reflector laser interferometer and its measurement method. On the basis of the existing Michelson laser interferometer, the interferometer adopts n light sources and n step plane angle mirror groups, and the measurement accuracy can reach Improve the measurement accuracy of the laser interferometer

Method used

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  • Wavelength correction type multi-beam cascaded step angle reflecting mirror laser interferometer and measurement method thereof
  • Wavelength correction type multi-beam cascaded step angle reflecting mirror laser interferometer and measurement method thereof
  • Wavelength correction type multi-beam cascaded step angle reflecting mirror laser interferometer and measurement method thereof

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Embodiment 2

[0075] Such as figure 1 , 4 As shown, in the laser interferometer described in embodiment 1, the precision displacement device 6 includes a support platform 8 and a driving device 9 arranged on the support platform 8, the support platform 8 and the measured object 12 In cooperation, the driving device 9 provides the measuring angle mirror 7 with a displacement in the displacement direction of the measured object 12, and the driving device 9 is a piezoelectric ceramic type driving device.

[0076] In this embodiment, the piezoelectric ceramic drive device 9 used is a functional ceramic material that can mutually convert mechanical energy and electrical energy. The amount of deformation generated under the action of an electric field is small, and does not exceed ten millionths of its size at most. A small displacement has good reciprocating deformation recovery ability, good stability and high precision, which further improves the precision of the precision displacement device 6 in...

Embodiment 3

[0078] Such as figure 1 , 4 As shown, in the laser interferometer described in embodiment 2, the precision displacement device 6 further includes a first displacement member 13 arranged on the supporting platform 8 and a second displacement member 13 arranged on the first displacement member 13 The displacement member 14, the driving device 9 cooperates with the first displacement member 13 to provide the first displacement member 13 with displacement along the support platform 8, and the first displacement member 13 has a The inclined surface 15 with an inclined displacement direction, the second displacement member 14 is slidably arranged on the inclined surface 15 of the first displacement member 13, so that the second displacement member 14 can slide along the inclined surface 15 of the first displacement member 13 , The first displacement member 13 and the second displacement member 14 are in close fit, the measuring angle reflector 7 is arranged on the second displacement ...

Embodiment 4

[0082] Such as Figure 4 As shown, in the laser interferometer described in embodiment 3, a magnetic member 11 with magnetism is also provided between the first displacement member 13 and the support platform 8, and the second displacement member 14 is magnetic, so The second displacement member 14 and the magnetic member 11 are in an attraction state of opposite sex, and the second displacement member 14 and the measuring angle reflector 7 are an integral structure. When the first displacement member 13 is pushed, the measuring angle reflector 7 can be kept in close contact with the second displacement member 14, so as to ensure the accuracy of the precision displacement device 6 of the present application, thereby ensuring the measurement accuracy of the laser interferometer of the present application. The two displacement members 14 and the measuring angle reflector 7 are an integral structure, that is, a reflecting surface is directly provided on the second displacement mem...

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Abstract

The invention discloses a wavelength correction type multi-beam cascaded step angle reflecting mirror laser interferometer comprising a laser source, a beam splitter, a step plane angle reflecting mirror group, a measurement angle reflecting mirror device and a photoelectric detector group. The laser source comprises n parallel laser beams, and n is greater than or equal to 2. The photoelectric detector group comprises n photoelectric detectors. The step plane angle reflecting mirror group is composed of m step plane angle reflecting mirrors and m-1 conventional angle reflecting mirrors through pairing, and m is greater than or equal to 2. The two reflecting step surfaces of the step plane angle reflecting mirrors are composed of n step planes. The measurement angle reflecting mirror device comprises a measurement angle reflecting device and a precision position device. The laser interference phenomenon generated by the laser interferometer is related to laser wavelength and also related to the height difference values of the step type reflecting planes. Displacement of which precision reaches the level of lambda / 2n can be detected by the photoelectric detector group, and laser wavelength is corrected in the measurement process so that influence of environment on the laser interference measurement result can be reduced and measurement precision can be substantially enhanced.

Description

Technical field [0001] The invention relates to the field of precision testing technology and instruments, in particular to a wavelength-corrected multi-beam cascade step-angle mirror laser interferometer and a measurement method thereof. Background technique [0002] The emergence of lasers has enabled the rapid development of ancient interference technology. The laser has the characteristics of high brightness, good directionality, monochromaticity and good coherence, and the laser interferometric measurement technology has been relatively mature. Laser interferometric measurement systems are widely used: precision length and angle measurement such as linear rulers, gratings, gauge blocks, precision lead screws; positioning detection systems in precision instruments such as precision machinery control and calibration; large-scale integrated circuits Positioning detection system in equipment and testing instruments; measurement of small dimensions, etc. In most laser interferom...

Claims

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Application Information

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IPC IPC(8): G01B9/02G01B11/02
Inventor 李享梅张白
Owner CHENGDU UNIV OF INFORMATION TECH
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