Short wavelength AlGaInP red light semiconductor laser
A semiconductor and laser technology, which is applied in the field of red semiconductor lasers, can solve the problems of low efficiency of semiconductor lasers and not too much strain, and achieve the effects of improving electro-optic conversion efficiency, improving growth quality, and increasing device reliability
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[0027] Such as figure 1 As shown, the short-wavelength AlGaInP red semiconductor laser of the present invention has a structure from bottom to top successively as substrate 1, lower buffer layer 2, lower confinement layer 3, lower waveguide layer 4, quantum well layer 5, upper waveguide layer 6, Upper confinement layer 7 , upper buffer layer 8 and ohmic contact layer 9 .
[0028] The substrate 1 is common N-type GaAs.
[0029] The lower buffer layer 2 is Al with a thickness of 1-2 μm x In 1-x P, Al composition x linearly changes from 0.5 to 0.6, that is, the first layer of growth is Al that matches the GaAs lattice 0.5 In 0.5 P, the last layer is Al 0.6 In 0.4 P, and the last layer of lattice strain is released, and its lattice constant is the same as that of the bulk material Al 0.6 In 0.4 p.
[0030] The lower confinement layer 3 and the upper confinement layer 7 are both 2-3 μm thick Al 0.6 In 0.4 p. For 620nm red wavelength, Al 0.6 In 0.4 The refractive index...
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