High-order resonance type micro-cantilever of atomic force microscope and manufacturing method thereof
An atomic force microscope and high-order resonance technology, used in scanning probe microscopy, measuring devices, instruments, etc., can solve problems such as low signal intensity and information loss
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[0021] The specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are only used to illustrate and explain the present invention, but not to limit the present invention.
[0022] Existing atomic force microscopy only excites and probes at the fundamental mode frequency of the microcantilever, and the frequencies outside the fundamental mode frequency are usually higher and the signal strength is much smaller than the fundamental mode frequency part, so they are ignored, resulting in the inclusion of Information about the interaction forces in the high frequency part is also lost. Therefore, the present invention provides a high-order resonance type microcantilever.
[0023] The high-order resonance type micro-cantilever provided by the present invention includes: a fixed end and a free end, the fixed end and the free end are integrated in...
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