Clamping type manipulator

Abstract

The invention discloses a clamping type manipulator. The clamping type manipulator comprises a manipulator base, a lifting driving mechanism arranged on the manipulator base, and a clamping mechanism arranged at the top end of the lifting driving mechanism, wherein the a manipulator base lateral movement driving mechanism is arranged on one side of the manipulator base; the clamping mechanism comprises a pair of rotary driving assemblies which are arranged at the top end of the lifting driving mechanism in a spaced mode; the rotary output end of each rotary driving assembly is connected with a revolving arm; the pair of revolving arms is arranged in parallel and the rotation directions of the revolving arms are opposite; clamping jaw fixing blocks are arranged on the revolving arms; clamping jaws used for clamping the edges of chip containing boxes are arranged on the clamping jaw fixing blocks; position sensors are arranged on the clamping jaw fixing blocks. The clamping type manipulator has the beneficial effects that 1, according to the clamping type manipulator, the chip containing boxes are directly clamped through the clamping jaws, and dust particle pollution and metal pollution are prevented, and thus the production quality of chips is ensured; and 2, clamping and transferring of the chip containing boxes can be achieved conveniently; the transferring speed is greatly increased; the transferring time is shortened; the work efficiency is improved.

Description

technical field [0001] The invention relates to the field of clamping equipment, in particular to a clamping manipulator suitable for the wet etching production process of semiconductor chips. Background technique [0002] In the wet etching production process of semiconductor chips, the semiconductor chip is usually placed in the chip holding box, and then the chip holding box is placed in the frame in the acid tank for wet etching, and the top of the frame is provided with a hook. The chip holding box is transported to the water tank. When the chip storage box needs to be moved, the hook is hooked by the manipulator or the hook is manually extracted to make the frame leave the acid tank, and then the chip storage box is taken out by the manipulator. This method of operation has the following disadvantages: [0003] 1. When hooking or extracting with the hook, the contact between the manipulator and the frame is likely to cause dust pollution or metal contamination, which...

AI Technical Summary

Problems solved by technology

[0003] 1. When hooking or extracting with the hook, the contact between the manipulator and the frame is likely to cause dust pollution or metal contamination, which affects the production quality of the chip;

[0004] 2. The handling speed and time are long, which reduces work efficiency and does not meet the requirements for the handling time between the acid tank and the water tank in the production process of some chips.

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