A coaxial reflective real-time monitoring laser etching system with three groups of grating microstructures

Abstract

The invention discloses a three-group-of-grating-microstructure-coaxial-reflection-type real-time laser etching monitoring system, which comprises a laser, a pinhole filter, a coaxial-reflection-type optical system and a real-time monitoring system. The pinhole filter is arranged to the output beam waist place of the laser; the coaxial-reflection-type optical system comprises a coaxial reflection-type hyperboloid beam expander mirror, a folding reflection mirror, a paraboloid collimation reflection mirror and three wave surface segmentation plane mirrors, wherein the folding reflection mirror is arranged between the reflection-type hyperboloid beam expander mirror and the paraboloid collimation reflection mirror, and the three wave surface segmentation plane mirrors are arranged between the folding reflection mirror and the paraboloid collimation reflection mirror; and the real-time monitoring system comprises an objective lens, a photoelectric detector, an imaging circuit and a control computer, which are connected in sequence. The system can etch symmetrically-distributed three groups of gratings synchronously at one time; the area of the three groups of gratings is large; no distortion of grating stripe and period can be ensured; precision is high; process uniformity is good; work efficiency is high; and product quality is improved and cost is reduced favorably.

Description

technical field [0001] The invention relates to the field of solar energy-saving glass, in particular to a three-group grating microstructure coaxial reflective real-time monitoring laser etching system. Background technique [0002] Over the past ten years, my country has made great progress in the research of diffraction grating theory and technology, and has achieved fruitful scientific research results. With the grating as the core technology, it has become possible to carry out technology integration and re-innovation, and develop high-tech dual-use grating technology products for military and civilian use. [0003] There is a two-dimensional periodic structure distribution in the plane, which can selectively transmit or shield electromagnetic waves. Such an artificial surface is called a frequency selective surface, and its technology is essentially a two-dimensional grating. Its period is generally several times the half-wavelength of the resonance. By adjusting the...

AI Technical Summary

Problems solved by technology

The processing, inspection, assembly and debugging of off-axis reflective optical systems are relatively difficult, and generally there is a large residual aberration of the outgoing wave

The off-axis reflective lithography system with poor performance is difficult to solve the technical problems of distortion control of the grating microstructure (including parameters such as period, duty ratio, groove depth and groove shape)

Moreover, there is no domestic laser etching equipment that simultaneously produces three groups of gratings

Large-aperture gratings need to be spliced, the production process is complicated, and the quality is difficult to guarantee

Moreover, in the laser etching of the three groups of gratings, it is necessary to precisely control the main exposure process parameters, which is highly dependent on the personal work experience of the technicians, and the production process consistency and work efficiency are not high.

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