Regulating method for distributed MEMS phase shifter working voltage based on phase shift magnitude electromechanical coupling

Abstract

The invention discloses a regulating method for distributed MEMS phase shifter working voltage based on phase shift magnitude electromechanical coupling. The regulating method comprises the steps that structural parameters, material properties and electromagnetic working parameters of distributed MEMS phase shifters are determined; a working voltage standard value V<0> and a phase shift magnitude standard value deltaphi<0> are determined; working voltage of 2V<0> is applied, and phase shift magnitude deltaphi in M MEMS bridges is measured; the phase shift magnitude measured value deltaphi and the standard value deltaphi<0> are compared; when the phase shift magnitude measured value deltaphi is greater than the standard value deltaphi<0>, upward height error of the MEMS bridges is obtained, and equivalent circuit parameters and working voltage regulating amount are calculated; when the phase shift magnitude measured value deltaphi is less than or equal to the standard value deltaphi<0>, downward height error or the state of error free of the MEMS bridges is obtained, the equivalent circuit parameters and a height error value are calculated, and the working voltage regulating amount is calculated; whether all the working voltage regulating amount is calculated is judged; the working voltage regulating amount is applied to the corresponding MEMS bridges again, and the overall phase shift magnitude of the distributed MEMS phase shifters is measured; and whether electrical performance of the distributed MEMS phase shifters after working voltage regulation can meet the indicator requirements is judged. Theoretical guidance is provided for reliability of practical work.

Description

technical field [0001] The invention belongs to the technical field of microwave devices, in particular to a method for adjusting the working voltage of a distributed MEMS phase shifter based on electromechanical coupling of phase shift. The invention relates to a method for adjusting the operating voltage of a distributed MEMS phase shifter, which can be used to guide the adjustment amount of the operating voltage of the distributed MEMS phase shifter during the working process, so as to ensure that the phase shift amount meets the performance requirements. Background technique [0002] With the development of RFMEMS (Micro-electromechanical Systems) technology, MEMS phase shifters have been widely used in various radar and satellite navigation fields due to their advantages of miniaturization, low loss, low cost, and good performance. Among them, the distributed MEMS phase shifter is easier to manufacture, smaller in size and better in performance than other forms of MEMS ...

AI Technical Summary

Problems solved by technology

[0005] Based on the above-mentioned problems, in order to ensure the performance of the phase shift amount of the distributed MEMS phase shifter in the actual working environment, the present invention utilizes the electromechanical coupling model between the structural parameters of the distributed MEMS phase shifter MEMS bridge height and the phase shift amount to realize The coupling analysis of structural parameters and electrical parameters of the distributed MEMS phase shifter effectively solves the problem that the height of the MEMS bridge cannot be determined during the working process of the distributed MEMS phase shifter. Combined with the control relationship between the operating voltage and the MEMS bridge, the operating voltage can be directly obtained The adjustment amount provides theoretical guidance for the reliability of distributed MEMS phase shifters in actual work

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