Windowing terminal point determining method for solar energy cell laser back electrode window

一种终点判断、背电极的技术,应用在太阳能电池领域,能够解决激光背电极窗口开窗工艺难直接应用于大规模电池生产、激光背电极窗口开窗工艺工艺难度、无法达到刻蚀绝缘钝化层等问题,达到开窗终点判断方法简单易行、缩短检测时间、成本低的效果

Inactive Publication Date: 2016-05-04
JIANGSU FOX ELECTRIC GRP CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] However, if the laser energy is too high, the silicon lattice structure on the surface of the battery will be destroyed, thereby forming a high recombination layer and reducing the efficiency of the battery; and if the laser energy is too low, the purpose of completely etching the insulating passivation layer cannot be achieved, so the laser There is a certain degree of difficulty in the window opening process of the back electrode window
Since the state of the back surface of each batch of solar cells is different, the laser back electrode window opening process is difficult to produce with a certain laser parameter
Therefore, the laser back electrode window opening process is difficult to be directly applied to large-scale battery production

Method used

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  • Windowing terminal point determining method for solar energy cell laser back electrode window
  • Windowing terminal point determining method for solar energy cell laser back electrode window

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Embodiment Construction

[0026] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0027] The method for judging the end point of window opening of the solar cell laser back electrode window in the embodiment of the present invention includes the following steps:

[0028] Step 1. Select a cell from the same batch of cells as a sample sample. A back passivation layer with a uniform thickness is deposited on the back of the cell sample. In this example, the back passivation layer is a silicon nitride layer.

[0029] Step 2. In an oxygen-free environment, use a pulsed laser with the same wavelength and pulse frequency to etch the back of the cell sample 20 times. The area of ​​the first etching is 20*100mm 2 , the second etching area is 19*100mm 2 , and so on, the area of ​​the 10th etching is 100mm 2 , the area of ​​the second etching is within the area of ​​the first etching, the area of ​​the third etching is within the are...

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Abstract

The invention relates to a windowing terminal point determining method for a solar energy cell laser back electrode window. According to the method, a back face of a cell is continuously etched for multiple times by utilizing laser with same wavelength and frequency, and the back face of the cell is finally a step-like structure, cell surface resistivity of each step surface is respectively measured, the corresponding relationship between a laser windowing terminal point and the laser thinning times is finally acquired, and thereby the thinning laser repetition times required for etching a back face passivation layer can be acquired. Compared with a traditional method, the back face passivation layer is thinned in a continuous mode, surface resistivity is further measured in a continuous mode, so the detection time is greatly shortened, production efficiency is improved, samples can be acquired through etching, and the state information after each etching can be integrally kept. The windowing terminal point determining method has advantages of simple and easy operation, low cost and relatively high precision.

Description

technical field [0001] The invention relates to a method for judging the window opening end point of a laser back electrode window of a solar battery, belonging to the technical field of solar batteries. Background technique [0002] With the improvement of people's awareness of environmental protection, the demand for clean energy is increasing. Among the new clean energy researched by people, solar energy, as a clean energy that is not subject to geographical restrictions, has become the main direction of new energy development in the future. Solar cells are the main devices that people use the sun's light energy to convert into electrical energy. However, the conversion efficiency of solar cells cannot meet people's requirements at present. Improving the conversion efficiency of solar cells and reducing the manufacturing cost of solar cells has become a research hotspot. [0003] In order to improve the conversion efficiency of the battery, various studies on the struc...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/66
CPCH01L22/14H01L22/20
Inventor 陈云
Owner JIANGSU FOX ELECTRIC GRP CO LTD
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