Measuring device of quantum efficiency of CCD device

Abstract

The invention brings forward a measuring device of the quantum efficiency of a CCD device. The measuring device comprises a light source, a monochromator, an integrating sphere, a beam expander, adjustable diaphragms, a darkroom, a standard detector, a CCD driving circuit, a picoammeter, and a master control computer; the CCD device and the standard detector are arranged in the darkroom; an output port of the monochromator is focused and amplified, collected to an optical fiber bundle, and injected to the integrating sphere; a light outlet of the integrating sphere is additionally provided with the beam expander, light is collected via the beam expander, and the light after collection and collimation enters the darkroom and is projected to the detected CCD or the standard detector via the adjustable diaphragm; and data acquisition is performed via the CCD driving circuit and the picoammeter, and data is transmitted to the master control computer for processing. According to the measuring device, the light outlet of the integrating sphere is additionally provided with the beam expander system so that the uniformity of the light source is improved, the effect of collecting and collimating the light is achieved, and the utilization rate of light energy is increased.

Description

technical field [0001] The invention relates to the technical field of testing, in particular to a measuring device for the quantum efficiency of a CCD device. Background technique [0002] CCD devices are one of the most widely used image sensors in the field of optical imaging, and quantum efficiency is an important basic parameter of CCD devices. Accurate calibration mainly has two meanings: on the one hand, it helps to improve the material selection and design and production process in the device development and production process; on the other hand, it helps the better application of CCD devices. [0003] To realize the precise measurement of the quantum efficiency of CCD devices, the key lies in the acquisition of the monochromatic uniform light source of the area array. It is necessary to ensure that the light energy is evenly and vertically irradiated on the photosensitive surface of the detector, and it is also necessary to ensure that the light source has sufficie...

AI Technical Summary

Problems solved by technology

[0007] First, the volume is too large, it is not easy to move and operate, which will bring some inconvenience to the test;

[0008] Second, the light energy emitted by the monochromator itself is weak, and the attenuation will be large when passing through the integrating sphere with a large aperture, and the CCD under test is far away from the integrating sphere, and the light energy is further weakened. Insufficient noise ratio occurs;

[0009] Third, the standard detector and the CCD under test need to be detected in the same position in turn during the test, but according to the current actual test situation, sometimes not only the CCD bare chip needs to be tested, but also the installed and adjusted CCD camera For the test, due to the obstruction of the shell structure of the CCD camera, it is not easy to determine the specific position of the CCD photosensitive surface, especially in the direction perpendicular to the light-emitting surface of the integrating sphere, there will be a certain deviation in the placement position of the standard detector and the CCD photosensitive surface. Measurement results bring certain errors

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