PECVD rework cell processing method

Abstract

The invention discloses a PECVD rework cell processing method. According to the adopted technical scheme, after HF film removing and washing of a PECVD rework cell, PECVD coating and screen printing are carried out directly to complete a cell preparation process. The PECVD rework cell processing method has the beneficial effect that the rework process is simplified, manpower and material resources are saved for companies, and the optimized process almost has no influence on the suede and the PN junction and has little influence on the final cell efficiency.

Description

technical field [0001] The invention relates to the field of solar battery sheet manufacturing, in particular to a PECVD reworked sheet processing method. Background technique [0002] Silicon nitride is widely used in the coating process of solar cells due to its good passivation, isolation of metal ions and insulation. At present, most of the silicon nitride films deposited in the solar cell process use tubular PECVD equipment. When the tubular PECVD equipment deposits silicon nitride, graphite boats are required as carriers. Insert the etched silicon wafer into the graphite boat and enter the furnace tube to deposit silicon nitride film. Since the graphite boat is used as an electrode to connect with the silicon wafer, the good or bad, new and old of the graphite boat is directly related to the silicon wafer. The uniformity of the silicon nitride film on the surface. Generally, when the uniformity of the film thickness is greater than 1.5%, it is easy to produce color j...

AI Technical Summary

Problems solved by technology

The rework process consists of secondary texturing, diffusion, and etching, so the suede surface produced by the reworked sheet is larger than the normal suede surface, and there are many processes, which will have a negative impact on production capacity and debris

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