Vector arc stage switching method and device for double rotary balance mass-based dynamic magnetic steel type magnetic levitation workpiece stages

A double-workpiece and quality-balancing technology, which is applied in the photolithographic process exposure device, the pattern surface photographic process, electrical components, etc., can solve the problem of increased structure of the main machine of the lithography machine, too long measuring optical path, and moment of inertia. Large and other problems, to achieve the effect of reducing the difficulty of control and implementation, reducing the complexity, and compacting the overall structure

CN105629676AInactive Publication Date: 2016-06-01HARBIN INST OF TECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Publication Date
2016-06-01
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention provides a vector arc stage switching method and device for double rotary balance mass-based dynamic magnetic steel type magnetic levitation workpiece stages, and belongs to a semiconductor manufacturing equipment technology. The device comprises a support frame, a balance mass block, a rotating shaft, magnetic levitation workpiece stages, a workpiece stage measurement device and a workpiece stage drive device, wherein the two workpiece stages work between a measurement station and an exposure station; the positions of the workpiece stages are measured by plane gratings; the workpiece stages are driven by magnetic levitation planar motors; and the two workpiece stages are driven by the planar motors to achieve single-beat arc fast stage switching in the double workpiece stage switching process. According to the vector arc stage switching method and device, the problems that an existing stage switching scheme has multiple beats, a long track, multiple starting and stopping beats, long stabilization time and the like are solved; the stage switching link is reduced; the stage switching time is shortened; and the productivity of a lithography machine is improved.
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Description

technical field

[0001] The invention belongs to the technical field of semiconductor manufacturing equipment, and mainly relates to a method and a device for a moving magnet steel maglev double workpiece table vector arc return transfer table based on a rotary balance mass. Background technique

[0002] Lithography machine is one of the important ultra-precision equipment in the manufacture of very large scale integrated circuits. As the key subsystem of the lithography machine, the workpiece table largely determines the resolution, overlay accuracy and productivity of the lithography machine.

[0003] Productivity is one of the main goals of lithography machine development. Under the condition of satisfying the resolution and overlay accuracy, improving the operating efficiency of the workpiece table and thus improving the productivity of the lithography machine is the development direction of the workpiece table technology. The most direct way to improve the operating ef...

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Embodiment Construction

[0025] Below in conjunction with accompanying drawing, embodiment of the present invention is described in further detail:

[0026] A method for moving magnetic steel maglev double workpiece stage vector arc transfer method based on rotary balance quality, the method includes the following steps: in the initial working state, the first workpiece stage at the measurement position is in a pre-aligned state, and the second workpiece stage at the exposure position In the exposure state; in the first step, after the pre-alignment of the first workpiece table at the measurement position is completed, it is driven by the moving magnet to move to the predetermined position A of the measurement position for changing the table, charging and waiting, and the second workpiece table at the exposure position is exposed by the moving magnet The steel drive moves to the predetermined position C of the exposure position; in the second step, the first workpiece table and the second workpiece tab...