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A method for the controllable preparation of multi-level bi-sb-te tilted column arrays by evaporative coating

A technology of evaporation coating and column array, which is applied in vacuum evaporation coating, chemical instruments and methods, sputtering coating, etc., can solve the problem of no inclined growth, etc., and achieve the effect of low cost, significant practical value, and large economic benefits

Inactive Publication Date: 2017-12-05
TIANJIN UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

From what we know, the novel multilevel Bi 1.5 Sb 0.5 Te 3 The column array structure has not been reported so far, and there is no oblique growth of multi-level Bi 1.5 Sb 0.5 Te 3 Patents and Literature Reports on Pillar Array Structures

Method used

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  • A method for the controllable preparation of multi-level bi-sb-te tilted column arrays by evaporative coating
  • A method for the controllable preparation of multi-level bi-sb-te tilted column arrays by evaporative coating
  • A method for the controllable preparation of multi-level bi-sb-te tilted column arrays by evaporative coating

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0039] Fabrication of Multi-level Bi by Evaporation Coating on Glass Substrates 1.5 Sb 0.5 Te 3 array of tilted columns;

[0040] (1) Bi with mass percent purity of 99.99% 1.5 Sb 0.5 Te 3 The powder was pressed under 8MPa pressure to make Bi 1.5 Sb 0.5 Te 3 block; the Bi 1.5 Sb 0.5 Te 3 The average particle size of the powder is less than 50 μm;

[0041] (2) The glass substrate (or glass plate) is ultrasonically cleaned in acetone, absolute ethanol and deionized water for 5 minutes, then taken out, and dried with high-purity nitrogen (mass percentage purity 99.999%);

[0042] (3) Add 0.1g of Bi 1.5 Sb 0.5 Te 3 Put the block into the tungsten boat in the vacuum chamber of the vacuum coating machine, place the glass substrate in the center of the sample stage, and adjust the angle between the sample stage and the horizontal plane θ =5 ° ;Adjust the distance d=15cm between the center of the glass substrate and the tungsten boat;

[0043] (4) Fill the vacuum cham...

Embodiment 2

[0051] Fabrication of Multi-level Bi by Evaporation Coating on Glass Substrates 1.5 Sb 0.5 Te 3 array of tilted columns;

[0052] (1) Bi with mass percent purity of 99.99% 1.5 Sb 0.5 Te 3 The powder was pressed under 10MPa pressure to make Bi 1.5 Sb 0.5 Te 3 block; the Bi 1.5 Sb 0.5 Te 3 The average particle size of the powder is less than 50 μm;

[0053] (2) The glass substrate (or glass plate) was ultrasonically cleaned in acetone, absolute ethanol and deionized water for 8 minutes, then taken out, and dried with high-purity nitrogen (mass percentage purity 99.999%);

[0054] (3) Add 0.1g of Bi 1.5 Sb 0.5 Te 3 Put the block into the tungsten boat in the vacuum chamber of the vacuum coating machine, place the glass substrate in the center of the sample stage, and adjust the angle between the sample stage and the horizontal plane θ =30 ° ;Adjust the distance d=15 cm between the center of the glass substrate and the tungsten boat;

[0055] (4) Fill the vacuum ...

Embodiment 3

[0063] Fabrication of Multi-level Bi by Evaporation Coating on Glass Substrates 1.5 Sb 0.5 Te 3 array of tilted columns;

[0064] (1) Bi with mass percent purity of 99.99% 1.5 Sb 0.5 Te 3 The powder was pressed under 9MPa pressure to make Bi 1.5 Sb 0.5 Te 3 block; the Bi 1.5 Sb 0.5 Te 3 The average particle size of the powder is less than 50 μm;

[0065] (2) The glass substrate (or glass plate) was ultrasonically cleaned in acetone, absolute ethanol and deionized water for 8 minutes, then taken out, and dried with high-purity nitrogen (mass percentage purity 99.999%);

[0066] (3) Add 0.1g of Bi 1.5 Sb 0.5 Te 3 Put the block into the tungsten boat in the vacuum chamber of the vacuum coating machine, place the glass substrate in the center of the sample stage, and adjust the angle between the sample stage and the horizontal plane θ =45 ° ;Adjust the distance d=15 cm between the center of the glass substrate and the tungsten boat;

[0067] (4) Fill the vacuum c...

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Abstract

The invention relates to a method for controllable preparation of a multi-level Bi-Sb-Te inclined column array by the adoption of evaporation coating. The method mainly comprises the steps that Bi1.5Sb0.5Te3 powder with the mass percent purity of 99.99% is pressed into a Bi1.5Sb0.5Te3 block under the pressure of 8-10 MPa; 0.1-0.2 g of the Bi1.5Sb0.5Te3 block is placed in a tungsten boat of a vacuum chamber of a vacuum coating machine; high-purity nitrogen is introduced into the vacuum chamber for 2-5 min before introduction is stopped, then the vacuum chamber is vacuumized, and the vacuum degree in the vacuum chamber is made to range from 2.0*10-4 Pa to 5.0*10-4 Pa; a heating temperature control power source is switched on, and after the temperature is raised to the predetermined temperature of 250-350 DEG C, the deposition rate is set to be 12-20 nm / min on a PID controller, and the deposition time is 2-3 h; an alternating-current power source is switched on, and the output current is regulated to be 160-170 A; preparation of the multi-level Bi1.5Sb0.5Te inclined column array by means of deposition on a substrate is started. The whole deposition technological process is simple, cost is low, large-scale production is easy, the obtained multi-level Bi1.5Sb0.5Te column array grows in an inclined mode, the nanowire and column array is uniform in structure, uniform distribution of nanophases is effectively guaranteed, and the application effect is very remarkable.

Description

technical field [0001] The invention relates to a method for preparing a multi-level inclined column array by simple physical vapor deposition, in particular to a method for controllingly preparing a multi-level Bi-Sb-Te inclined column array by using evaporation coating. Background technique [0002] At present, thermoelectric material is a solid material that can realize mutual conversion between heat energy and electric energy. It has the advantages of relatively simple structure, no mechanical moving parts such as rotation or movement, high reliability, no noise, small size, and environmental friendliness. It is very suitable for Fabrication of small-scale power generation and local cooling devices. Bismuth telluride-based materials are currently the best room-temperature thermoelectric materials, and their commercial bulk thermoelectric figures of merit ZT Generally around 1.0. According to theory and experiments, it has been proved that the low-dimensional nanostruct...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/26B82Y40/00C23C14/06C01B19/00
CPCB82Y40/00C01B19/002C01P2002/72C01P2004/03C01P2006/32C01P2006/40C23C14/0623C23C14/26
Inventor 谭明郝延明蔡元学秦月婷谢宁吴泽华
Owner TIANJIN UNIV OF SCI & TECH
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