Micro-nano optical sensor system capable of achieving concentration measurement of various gases

Abstract

The invention discloses a micro-nano optical sensor system capable of achieving concentration measurement of various gases. The system comprises a laser device, an optical fiber splitting device, an optical detection unit and a miniature integrated sensor chip, wherein the input end of the optical fiber splitting device is connected with the light output end of the laser device through single mode fiber, the optical fiber splitting device is used for splitting light output by the laser device into two completely identical optical signals, the input end of the optical detection unit is connected with the output end of the optical fiber splitting device through single mode fiber, the optical detection unit is used for receiving one optical signal and taking the optical signal as a reference signal, the input end of the miniature integrated sensor chip is connected with the output end of the optical fiber splitting device through single mode fiber, the miniature integrated sensor chip is used for receiving the other optical signal for optical measurement, and the output end of the miniature integrated sensor chip is connected with the input end of the optical detection unit. According to the system, measurement is conducted completely based on the optical waveguide sensing principle, antijamming capability is high, measurement precision and sensitivity are high, remote measurement can be achieved, concentration of various gas components can be measurement, and due to the fact that the size of the chip is small, the system can be used for online measurement of concentration of various gas components in narrow space.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to a micro-nano optical sensor system capable of measuring the concentration of various gases. Background technique [0002] At present, most of the commercial gas sensors are semiconductor sensors or electrochemical sensors, and the output signals are generally electrical signals, and the size is generally above the centimeter level. Since the output is a voltage or current signal, it is often subject to large external interference, resulting in large sensor errors and low measurement accuracy. Therefore, in practical applications, it is necessary to design supporting circuits, such as I / V conversion, preamplification circuits, etc. However, semiconductor gas sensors often need a long time to warm up before measurement to ensure high measurement accuracy, and the response speed is slow. [0003] In addition, micro-integrated sensors for the measurement of multiple gas concentratio...

AI Technical Summary

Problems solved by technology

Since the output is a voltage or current signal, it is often subject to large external interference, resulting in large sensor errors and low measurement accuracy. Therefore, it is necessary to design supporting circuits in practical applications, such as I / V conversion, preamplification circuits, etc.

However, semiconductor gas sensors often need a long time to warm up before measurement to ensure high measurement accuracy, and the response speed is slow

[0003] In addition, micro-integrated sensors for the measurement of multiple gas concentrations are still very rare. Even the commercialized micro-sensors (such as based on micro-electro-mechanical systems (MEMS) technology) can only measure a certain gas parameter, and their output signals are still in the form of Mainly electrical signals, but also face the disadvantages of weak output signals, need for supporting circuits, and poor anti-interference

Images