3D Micro/Nano Measuring Probe

Abstract

The invention discloses a high-precision wide-measuring-range three-dimensional micro-nano measuring probe. The high-precision wide-measuring-range three-dimensional micro-nano measuring probe is characterized in that a measuring probe unit and a measuring unit are fixedly connected through a support part, the measuring probe unit of the probe is provided with a two-layer suspension structure, a front-end suspension structure body is provided with a planar reflecting mirror and a measuring probe needle, and a rear-end suspension structure body is fixedly provided with a light blocking blade and connected with the front-end suspension structure body through a connecting probe rod; the measuring unit has a beam splitter prism used for splitting light source beams into reflected light and transmission light, the light intensity of the reflected light is changed due to Z-direction linkage of the light blocking blade, the reflected light irradiates a first four-quadrant detector, and the transmission light irradiates a second four-quadrant detector through reflection of three planar reflecting mirrors; displacement and two-dimensional angle measurement on the planar reflecting mirrors is achieved through detection signals output by the first four-quadrant detector and the second four-quadrant detector. The high-precision wide-measuring-range three-dimensional micro-nano measuring probe can achieve the detection effects of being high in precision and sensitivity, wide in measuring range, small in measuring force and high in stability.

Description

technical field

[0001] The invention relates to the field of three-dimensional micro-nano measurement, more specifically, a high-precision and large-range three-dimensional micro-nano measuring probe applied to a nano-coordinate measuring machine, which can sense the three-dimensional shape of the surface of an object. Background technique

[0002] With the rapid development of nanotechnology, all walks of life are competing to launch a technological revolution in the miniaturization of devices, and micro devices with sizes between millimeters and microns have come out one after another. Especially with the rapid development of MEMS (Micro-Electro-Mechanical System) device processing technology, various tiny devices with nanoscale as the standard have emerged. MEMS products such as micro-turbine, micro-needle array, gear-driven micro-motor, micro-lens, micro-nozzle and micro-gear. The geometric structure of these micro-devices is becoming more and more complex, and the geom...

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