Planar optical waveguide structure and coupling structure and coupling method thereof
A planar optical waveguide and coupling structure technology, applied in the field of optical waveguide coupling, can solve the problems of large-scale integration difficulties, high packaging costs, complex processes, etc., to reduce costs, ensure process quality, and shorten light and welding time. Effect
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Embodiment 1
[0043] Embodiment 1 of the present invention provides a coupling structure based on a planar optical waveguide, the structure includes a single-mode active device and a planar optical waveguide PLC, such as figure 1 As shown, specifically:
[0044] The planar optical waveguide PLC includes a silicon dioxide waveguide for transmitting optical signals, wherein the silicon dioxide waveguide is composed of a coupling section and a conducting section.
[0045] Among them, single-mode active devices include but are not limited to Fabry-Perot lasers (Fabry-Perot, abbreviated as: FP), distributed feedback lasers (Distributed Feedback Lasers, abbreviated as: DFB), electro-absorption modulated lasers (Electlro-absorption Modulated Laser , abbreviated as: EML), based on semiconductor optical amplifier (semiconductor optical amplifier, abbreviated as: SOA) and so on.
[0046] The coupling section is a positive ladder structure or an inverted ladder structure, wherein the surface where th...
Embodiment 2
[0052] Embodiment 1 of the present invention provides a coupling structure based on a planar optical waveguide. Next, a specific description will be given to the planar optical waveguide structure used in Embodiment 1. The planar optical waveguide structure includes a coupling structure for transmitting optical signals. Silica waveguides, such as figure 2 and 3 As shown, specifically:
[0053] The silica waveguide is composed of a coupling section and a conducting section;
[0054] The coupling section is a forward ladder structure or an inverted ladder structure, wherein the surface of the coupling section used for coupling with the single-mode active device is the top of the ladder, and the surface connecting the coupling section and the conductive section is the bottom of the ladder.
[0055] From the perspective of the process complexity of manufacturing the planar optical waveguide structure, the embodiment of the present invention provides a preferred implementation s...
Embodiment 3
[0062] In addition to providing the coupling structure described in Embodiment 1 and the optical planar waveguide structure described in Embodiment 2, the embodiment of the present invention proposes a coupling method based on a planar optical waveguide based on the above structure. The silicon dioxide in the planar optical waveguide A waveguide consists of a coupling segment and a conducting segment, such as Figure 6 As shown, the method includes:
[0063] In step 201, the planar optical waveguide is generated, and the coupling section is a ladder body structure, wherein the width of the ladder top surface W1=2.6 μm, the height of the ladder top surface H1=4.4 μm; the width of the ladder bottom surface W2=3.3 μm, and the ladder bottom surface Height H2 = 4.4 μm; ladder length L = 800 μm.
[0064] Preferably, the PLC waveguide in the embodiment of the present invention is a silicon-based silicon dioxide embedded rectangular waveguide, wherein the core layer of the coupling s...
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Abstract
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