Novel small measuring range ultrahigh precision displacement sensor and measuring method

Abstract

The invention discloses a novel small measuring range ultrahigh precision displacement sensor and a measuring method. The sensor comprises a laser beam, two reflectors, a photoelectric detector, and a processing system. According to the sensor, the laser beam is reflected continuously between the two reflectors which are paralleled arranged, and finally the laser beam irradiates at one position of the photoelectric detector; then the space between the two reflectors is changed and therefore the reflecting path of the laser beam is changed so that the laser beam irradiates at another position of the photoelectric detector. The processing system obtains a detection distance value through processing according to the two different positions, wherein the detection distance value is far more than the real change value of the space between the two reflectors; the processing system can calculate the real change value of the space between the two reflectors through the detection distance value. The sensor having a simple structure, reliable measurement and high precision can be applied in measuring continuous displacement change of objects and is easy for batch manufacture.

Description

technical field [0001] The invention relates to the field of precision measurement technology and instruments, in particular to a novel small-range ultra-high-precision displacement sensor and a measurement method. Background technique [0002] Displacement sensor is a commonly used geometric quantity sensor, which is widely used in many fields such as aerospace, industrial production, machinery manufacturing and military science. There are many ways to measure displacement. Smaller displacements (such as less than 1cm) are usually detected by strain gauges, inductances, differential transformers, eddy currents, and Hall sensors. Larger displacements (such as greater than 1cm) are usually detected by induction synchronization. Sensors, gratings, capacitive grids, magnetic grids and other sensing technologies to measure. Among them, the grating sensor has the advantages of easy digitalization, high precision (currently the highest resolution can reach the nanometer level), s...

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Problems solved by technology

[0005] The purpose of the present invention is to overcome the existing grating sensor existing in the prior art due to the physical structure limitations of the photolithography process, which makes it difficult to improve the measurement accuracy and cannot meet the above-mentioned shortcomings of the increasingly higher measurement accuracy requirements. Provide a new type of small-range ultra-high-precision displacement sensor and measurement method. The sensor has a simple structure and is suitable for the measurement of continuous changes in the displacement of the measured object. The measurement is reliable, the accuracy is high, and it is easy to realize mass production.

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