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Incremental type small-measurement-range displacement sensor and measurement method

A technology of displacement sensor and measurement method, which is applied in measurement devices, instruments, optical devices, etc., can solve the problems of inability to meet measurement accuracy and difficulty in improving measurement accuracy, and achieve reliable measurement, simple structure, and easy mass production. Effect

Active Publication Date: 2016-07-20
泰安泰山科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to overcome the existing grating sensor existing in the prior art due to the physical structure limitations of the photolithography process, which makes it difficult to improve the measurement accuracy and cannot meet the above-mentioned shortcomings of the increasingly high measurement accuracy requirements. Provides an incremental small-range displacement sensor and a measurement method, the sensor has a simple structure, is suitable for measuring the displacement change of a measured object, has reliable measurement, high precision, and is easy to realize mass production

Method used

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  • Incremental type small-measurement-range displacement sensor and measurement method
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  • Incremental type small-measurement-range displacement sensor and measurement method

Examples

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Embodiment 1

[0047] Such as Figure 1-3 As shown, an incremental small-range displacement sensor described in the present invention includes a laser beam 11, two mirrors, a distributed photodetector 5 and a processing system.

[0048] The distributed photodetector 5 is provided with a detection part 1 51, a detection part 2 52 and a detection part 3 53 at fixed intervals, and the detection part 3 53 is arranged on the linear connection between the detection part 1 51 and the detection part 2 52 At any position between the lines, the two reflectors are arranged in parallel and can move relative to each other. The laser beam 11 is arranged at both ends of the two reflectors opposite to the distributed photodetector 5, and the laser beam 11 is incident On one of the reflectors, after being alternately reflected by two reflectors, it is emitted to the distributed photodetector 5, and is sensed by the first detection part 51, the second detection part 52 and the third detection part 53 , the p...

Embodiment 2

[0051] Such as Figure 1-3 As shown, a kind of incremental small-range displacement sensor of the present invention and measured object 7, described sensor comprises laser beam 11, fixed reflector 2, movable reflector 3, distributed photodetector 5 and processing system .

[0052] The object to be measured 7 is connected to the movable reflector 3 through a rigid member, and the distributed photodetector 5 is provided with a detection component 1 51 , a detection component 2 52 and a detection component 3 53 at fixed intervals, and the detection component Three 53 are arranged at any position between the straight line connecting the first detection part 51 and the second detection part 52, the fixed reflector 2 is arranged in parallel with the movable reflector 3, and the movable reflector 3 can be connected with the fixed reflector 3. The reflector 2 moves relatively, and the laser beam 11 is arranged opposite to the distributed photodetector 5 at both ends of the fixed refl...

Embodiment 3

[0055] Such as Figure 1-3As shown, an incremental small-range displacement sensor and a measured object 7 according to the present invention, the sensor includes a laser source 1, a laser beam 11, a fixed mirror 2, a moving mirror 3, a detection mirror 4, The distributed photodetector 5 and the processing system also include a housing and a connecting piece 31 .

[0056] The laser beam 11 is obtained by emitting the laser source 1, and the laser source 1, the fixed reflector 2, the movable reflector 3, the connecting piece 31, the detecting reflector 4 and the distributed photodetector 5 are all located in the housing, Form the reading head 6, the reading head 6 is provided with mounting holes or sticking parts, the moving reflector 3 is connected to the connecting part 31, the connecting part 31 is a rigid part, and the connecting part 31 extends out of the reading The head 6 is externally connected to the measured object 7, and the distributed photodetector 5 is provided w...

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Abstract

The invention discloses an incremental type small-measurement-range displacement sensor and a measurement method. The sensor comprises a laser beam, two reflection mirrors, a distributed type photoelectric detector and a processing system. With the adoption of the sensor, the laser beam is reflected continuously between one group of the two reflection mirrors which are arranged in parallel, and is finally illuminated to the distributed type photoelectric detector, so that the distance between the two reflection mirrors is changed, and a reflection path of the laser beam can be changed; a detection part I, a detection part II and a detection part III on the distributed type photoelectric detector are used for inducing the laser beam for three times, and the processing system is used for processing according to the number of times of receiving the laser beam by detection parts and the distance between the detection parts to obtain a detection value; the detection value is larger than a real change value of the distance between the two reflection mirrors; and the processing system can be used for calculating the real change value of the distance between the two reflection mirrors through the detection value. The sensor is simple in structure and is applicable to measurement of displacement changes of an object to be detected; and the sensor can be used for reliably measuring and has relatively high precision, and can be easily manufactured in a large batch.

Description

technical field [0001] The invention relates to the field of precision measurement technology and instruments, in particular to an incremental small-range displacement sensor and a measurement method. Background technique [0002] Displacement sensor is a commonly used geometric quantity sensor, which is widely used in many fields such as aerospace, industrial production, machinery manufacturing and military science. There are many ways to measure displacement. Smaller displacements (such as less than 1cm) are usually detected by strain gauges, inductances, differential transformers, eddy currents, and Hall sensors. Larger displacements (such as greater than 1cm) are usually detected by induction synchronization. Sensors, gratings, capacitive grids, magnetic grids and other sensing technologies to measure. Among them, the grating sensor has the advantages of easy digitalization, high precision (currently the highest resolution can reach the nanometer level), strong anti-int...

Claims

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Application Information

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IPC IPC(8): G01B11/02
CPCG01B11/02
Inventor 张白潘俊涛
Owner 泰安泰山科技有限公司
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