Temperature stabilized piezoelectric composite ceramic vibrator
A piezoelectric ceramic and piezoelectric composite technology, applied in piezoelectric devices/electrostrictive devices, piezoelectric/electrostrictive/magnetostrictive devices, circuits, etc. It is easy to deform and crack, and the production cost is high, so as to reduce the production cost, improve the piezoelectric performance and reliability, and improve the temperature coefficient.
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Embodiment 1
[0039] The temperature change rate of piezoelectric ceramics at -30°C is -34%, and the rate of change of capacity temperature at +85°C is +22%; The rate of change in capacity temperature at +85°C is -23%, the thickness of the dielectric ceramic is 0.2mm, the piezoelectric ceramic is a single-layer ceramic, and the dielectric ceramic is composed of a single-layer ceramic capacitor. The first and second electrodes The layers are all silver electrodes with a thickness of 5 microns, and are made into temperature-stabilized piezoelectric composite ceramic vibrators as required.
Embodiment 2
[0041] The temperature change rate of piezoelectric ceramics at -30°C is -15%, and the change rate of capacity temperature at +85°C is +35%; The rate of change in capacity temperature at +85°C is -65%, the thickness of the dielectric ceramic is 0.1mm, the piezoelectric ceramic is a single-layer ceramic, and the dielectric ceramic is composed of a multilayer ceramic capacitor. The first and second electrodes The layers are all silver / palladium electrodes with a thickness of 20 microns, and are made into temperature-stabilized piezoelectric composite ceramic vibrators as required.
Embodiment 3
[0043] The temperature change rate of piezoelectric ceramics at -30°C is -35%, and the rate of change of capacity temperature at +85°C is +25%; The rate of change in capacity temperature at +85°C is -10%, the thickness of the dielectric ceramic is 0.6, mm, the piezoelectric ceramic is a single-layer ceramic, the dielectric ceramic is composed of a multi-layer ceramic capacitor, and the first electrode layer is Silver / palladium electrode, the second electrode layer is a silver electrode, the thickness is 10 microns, and the temperature-stabilized piezoelectric composite ceramic vibrator is made as required.
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Abstract
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