Ion beam regulating device, ion optical system and secondary ion mass spectrometer

Abstract

The invention discloses an ion beam regulating device, an ion optical system and a secondary ion mass spectrometer. The ion beam regulating device comprises at least two cascaded multistage rods and a driving module, wherein a preset distance exists between adjacent two multistage rods; the driving module is electrically connected with each multistage rod respectively; each multistage rod comprises at least four electrodes; and in a direction vertical to the cross section of the multistage rod, electrodes forming the multistage rod are uniformly arranged along the same circumference, and projections of circle centers of the circumferences formed by the multistage rods coincide mutually. Electric signals are applied to each electrode of each multistage rod via the driving module, the flying direction and the phase of ion beams incident to the cascaded multistage rods are regulated, the ion beams are controlled to always move along the needed optical axis, ion optical aberration generated during the flying process of the ions is eliminated, a small ion beam spot diameter is realized, the ion beam transmission efficiency is ensured, the beam spot density is uniform when the ion beams bombard the surface of a sample, and the sample cleaning function of the secondary ion mass spectrometry is also realized.

Description

technical field [0001] The invention relates to the technical field of analysis, in particular to an ion beam adjustment device, an ion optical system and a secondary ion mass spectrometer. Background technique [0002] Secondary ion mass spectrometry (SIMS) is currently one of the most sensitive surface chemical analysis methods, which can be used to analyze the chemical composition and content of samples, and is widely used in analytical chemistry, semiconductor technology, environmental protection, food Safety and geochemistry and other fields. SIMS has the characteristics of high spatial resolution and high sensitivity, and can perform deep sample composition analysis, three-dimensional ion imaging and determination of element isotope abundance in the micro area. The basic principle of secondary ion mass spectrometer (SIMS) is that the primary ion beam bombards the surface of the sample after passing through the primary ion optical system, so that the molecules or atoms...

AI Technical Summary

Problems solved by technology

During the working process of the secondary ion mass spectrometer, after the primary ions generated by the ion source are focused and deflected by the traditional lens and deflection plate, in most cases the ions will deviate from the theoretical optical axis, which will lead to the ion flying process. Large ion optical aberrations will not only affect the transmission efficiency of ions, but also cause uneven beam spot density and irregular beam spot shape when ions bombard the sample surface.

These problems will have varying degrees of impact on the analytical results of the instrument under different application backgrounds.

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