RF coplanar waveguide element based on silicon-on-insulator substrate and its preparation method

Abstract

The present invention provides a radio frequency coplanar waveguide element based on a silicon base on an insulator and a preparation method thereof. The method comprises: 1) preparing the silicon base on an insulator, wherein the silicon base on the insulator includes a ground floor silicon, an insulating layer and a top silicon which are stacked in order, and the lower portion of the insulating layer is provided with at least one groove of the ground floor silicon corresponding to the position of the preparation of the radio frequency coplanar waveguide element; 2) defining a device area, removing the top chain of the device area, and exposing the upper surface of the insulating layer at the lower portion of the device area; and 3) preparing the radio frequency coplanar waveguide element. Based on the silicon base on the graphical insulator, the radio frequency coplanar waveguide element based on the silicon base on the insulator and the preparation method thereof obtain the coplanar waveguide with a substrate cavity through later period etching, the air medium in the cavity structure allows the equivalent capacitance of the substrate to be reduced and allow the equivalent resistance to be increased so as to eliminate fixed charge and movable charge in the SiO2 and the unfavorable factors, influencing microwave transmission, such as Si / SiO2 system interface state, trap charge and the like, and therefore the medium loss is reduced, and the transmission performance of the coplanar waveguide is improved.

Description

technical field

[0001] The invention relates to a semiconductor component and a preparation method thereof, in particular to a radio frequency coplanar waveguide element based on a silicon-on-insulator substrate and a preparation method thereof. Background technique

[0002] Waveguide (WAVEGUIDE) refers to the structure used to guide electromagnetic waves. The common waveguide structures mainly include parallel twin wires, coaxial lines, parallel planar waveguides, rectangular waveguides, circular waveguides, microstrip lines, planar dielectric optical waveguides and optical fibers. From the perspective of guiding electromagnetic waves, they can be divided into inner and outer regions, and electromagnetic waves are limited to propagate in the inner region (requiring the transverse resonance principle to be satisfied within the waveguide cross-section).

[0003] Generally, waveguides refer to hollow metal waveguides and surface waveguides of various shapes. The former complet...

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