Graphene photodetector based on metamaterial structure
A photodetector and graphene technology, applied in the direction of semiconductor devices, sustainable manufacturing/processing, electrical components, etc., can solve the problems of high electromagnetic loss, modulation speed limitation, and equivalent capacitance increase, and achieve high modulation speed, Easy integration and small equivalent capacitance
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[0025] Choose a single-sided polished silicon wafer as the substrate, evaporate 150nm gold on the substrate by electron beam evaporation, and deposit 180nm Si by radio frequency magnetron sputtering 3 N 4 On Au, then use chemical deposition method to let graphene grow on Si 3 N 4 On, and then use the method of plasma chemical deposition, the 180nm Si 3 N 4 formed on graphene. Repeated 12 times in turn.
[0026] What the present invention adopts is metal layer-medium layer-graphene layer-medium layer-graphene layer-medium layer-graphene layer-medium layer-graphene layer-medium layer-graphene layer-medium layer-graphene layer- Dielectric layer - graphene layer - dielectric layer - graphene layer - dielectric layer - graphene layer - dielectric layer - graphene layer - dielectric layer - graphene layer - dielectric layer - graphene layer its composition see figure 1 , figure 2 .
[0027] exist figure 1 and 2 Among them, marks 1-12 are single-atom graphene layers, and ...
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