The invention discloses a compact
Marx generator based on an
impact ionization semiconductor device, and relates to the field of a pulse power technology and a
power semiconductor device crossing technology. Comprising N stages of sub Marx generators which are cascaded in sequence, and each sub
Marx generator comprises an
impact ionization semiconductor device, a first charging isolation element, a second charging isolation element, an
energy storage unit, a first ground
capacitor and a second ground
capacitor; for any stage of sub
Marx generator, the first end of the
impact ionization semiconductor device is connected with the first end of the first charging isolation element, the first end of the first ground
capacitor and the first end of the
energy storage unit, the second end of the first ground capacitor is grounded, the second end of the
impact ionization semiconductor device is connected with the first end of the second charging isolation element, and the second end of the second charging isolation element is grounded. The second end of the second charging isolation element is connected with the second end of the
energy storage unit and the first end of the second ground capacitor, and the second end of the second ground capacitor is grounded. According to the compact Marx generator, the conduction safety is improved.