Portable high-dynamic-precision large-working-distance auto-collimation device and method

A portable, high-dynamic technology, applied in active optical measurement devices, measurement devices, optical devices, etc., can solve problems such as the inability to achieve self-collimation and micro-angle measurement, the reflected beam deviates from the entrance pupil, and the range cannot be too large

Active Publication Date: 2016-10-12
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] First, the range of the angle between the normal of the mirror surface of the measured object 5 and the optical axis of the laser autocollimator should not be too large, otherwise the reflected beam will deviate from the entrance pupil of the laser autocollimator optical system, resulting in failure to achieve self-collimation Straight and micro angle measurement;
[0009] Second, the distance between the mirror surface of the measured object 5 and the entrance pupil of the la

Method used

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  • Portable high-dynamic-precision large-working-distance auto-collimation device and method
  • Portable high-dynamic-precision large-working-distance auto-collimation device and method
  • Portable high-dynamic-precision large-working-distance auto-collimation device and method

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Experimental program
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Example Embodiment

Specific embodiment one

[0073] This embodiment is an embodiment of a portable self-collimating device with high dynamic accuracy and large working distance.

[0074] The portable self-collimating device with high dynamic accuracy and large working distance of this embodiment has a schematic structural diagram such as figure 2 Shown. The self-collimating device includes a light source 1, a reflective collimator 22, a reflective mirror 3, and a feedback imaging system 6. The reflective mirror 3 is provided with an angle adjustment and measuring device 4; the light beam emitted by the light source 1 passes through a reflective collimator After the straight mirror 22 is collimated into a parallel beam, it is reflected by the mirror 3 and incident on the surface of the object 5; the light beam reflected from the surface of the object 5 is reflected by the mirror 3 and collected by the feedback imaging system 6. Imaging

[0075] The feedback imaging system 6 is arranged between the li...

Example Embodiment

Specific embodiment two

[0078] This embodiment is an embodiment of a portable self-collimating device with high dynamic accuracy and large working distance.

[0079] The portable self-collimating device with high dynamic accuracy and large working distance of this embodiment has a schematic structural diagram such as Figure 5 Shown. On the basis of specific embodiment 1, the portable autocollimator with high dynamic accuracy and large working distance of this embodiment is also provided with a wavefront detection system 7 and a wavefront compensation system 8;

[0080] The wavefront detection system 7 includes a wavefront detection beam splitter 71 and an air disturbance wavefront detector 72; the wavefront detection beam splitter 71 is arranged between the reflector 3 and the object 5, and the air disturbance wavefront detector 72 is arranged on the reflection light path of the wavefront detection beam splitter 71, and the mirror-shaped variable wavefront detector 73 is arranged...

Example Embodiment

Specific embodiment three

[0082] This embodiment is an embodiment of a portable self-collimating device with high dynamic accuracy and large working distance.

[0083] The portable self-collimating device with high dynamic accuracy and large working distance of this embodiment has a schematic structural diagram such as Image 6 Shown. On the basis of specific embodiment 1, the portable autocollimator with high dynamic accuracy and large working distance of this embodiment is also provided with a wavefront detection system 7 and a wavefront compensation system 8;

[0084] The wavefront detection system 7 includes a wavefront detection beam splitter 71 and a mirror deformable wavefront detector 73; the wavefront detection beam splitter 71 is arranged between the mirror 3 and the object 5, and the air disturbance wavefront detection The device 72 is arranged on the reflection light path of the wavefront detection beam splitter 71, and the mirror deformable wavefront detector 73 is ar...

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Abstract

The invention belongs to the technical field of precision measurement and the field of optical engineering and particularly relates to a portable high-dynamic-precision large-working-distance auto-collimation device and method. The device is composed of a light source, a collimating mirror, a reflecting mirror and a feedback imaging system. The method includes the steps that the reflecting mirror is adjusted, reflected light beams return to the center of the image surface of the feedback imaging system, and the angle change of the surface of a measured object is acquired through an angle deflection measuring device on the reflecting mirror. Due to the fact that the reflecting mirror is additionally arranged on a traditional auto-collimation angle measuring system, the problem that due to the fact that reflected light of the measured object deviates from the measuring system, measurement cannot be carried out can be avoided, and then the advantage that the auto-collimation working range is increased at the same working distance or the working distance is increased within the same working range is achieved; in addition, through the specific design of the collimating mirror, the feedback imaging system, the reflecting mirror and the like, the device and method further have the technical advantages that the device is small, portable and high in measuring precision; the assembly process of the measured object can be monitored in the whole course; measurement is rapid.

Description

technical field [0001] The invention belongs to the technical field of precision measurement and the field of optical engineering, in particular to a portable high dynamic precision large working distance self-collimation device and method. Background technique [0002] In the fields of precision measurement technology, optical engineering, cutting-edge scientific experiments and high-end precision equipment manufacturing, there is an urgent need for large working range and high-precision laser self-collimation technology at a large working distance. It supports the development of technology and equipment in the above fields. [0003] In the field of precision measurement technology and instruments, the combination of laser autocollimator and circular grating can measure any line angle; the combination of laser autocollimation technology and polyhedral prism can measure surface angle and circular indexing; the maximum working distance From a few meters to hundreds of meters...

Claims

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Application Information

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IPC IPC(8): G01B11/26G01C15/00
CPCG01B11/26G01C15/002
Inventor 谭欣然王超谭久彬
Owner HARBIN INST OF TECH
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