Compact type flexible substrate magneto-controlled sputter coating equipment and method

Abstract

The invention discloses compact type flexible substrate magneto-controlled sputter coating equipment and method. According to the equipment, a partition clapboard is arranged in a vacuum chamber, space in the vacuum chamber is divided into a winding area and a coating area, the partition clapboard is provided with a through hole for a flexible substrate to pass through, the flexible substrate penetrates the whole vacuum chamber, a heater and an ion source are arranged in the winding area, a magneto-controlled sputter device is arranged in the coating area, multiple unit clapboards are arranged in the coating area, and space in the coating area is divided into one flexible substrate conveying unit and multiple coating units. According to the method, the winding area and the coating area in the vacuum chamber are vacuumized, and the flexible substrate unwound by an unwinding roller passes through the winding area firstly, and is subjected to ion treatment and preheating in the winding area, then conveyed into the coating area, subjected to sputter coating through the multiple coating units in sequence and finally conveyed to the winding area to be wound through a winding roller. The equipment is compact in structure, saves equipment cost and can effectively prevent work atmospheres of the different process stages from influencing one another.

Description

technical field [0001] The invention relates to the technical field of flexible substrate coating, in particular to a compact flexible substrate magnetron sputtering coating equipment and method. Background technique [0002] With the development of modern industrial technology, the demand for coating on flexible substrates is increasing. The flexible substrate film not only has the photoelectric characteristics of the rigid substrate film, but also has the advantages of light weight, foldable, unbreakable, easy to transport, and less investment in equipment. It is widely used in high-performance car film, plasma TV flat panel display, touch screen, solar battery and other fields. According to different application requirements, the functional requirements of the coated film layer are also different, but in general, the functional requirements of various industries for flexible substrate films are becoming higher and higher, and the film structure also tends to become more ...

AI Technical Summary

Problems solved by technology

[0004] (1) The production line is generally equipped with multiple coating chambers for multiple coatings on the surface of flexible substrates or multi-layer coatings of different types of films. Multiple coating chambers are generally installed side by side in a linear structure. The equipment is large in size and occupies an area Also large, high equipment cost

[0005] (2) Before coating the flexible substrate, the surface of the flexible substrate is usually treated with an ion source to remove impurities on the surface of the substrate and improve its surface appearance. However, due to the vacuum requirements of the coating chamber, the working gas of the ion source is often Without effective discharge, it is easy to affect the working atmosphere of other working mechanisms in the equipment

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