Tunneling magnetoresistive (TMR) device and tunneling magnetoresistive read head
A technology of tunneling magnetoresistance and devices, which is applied in the manufacture of flux-sensitive magnetic heads, magnetic field-controlled resistors, magnetic recording heads, etc.
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[0015] figure 2 is a highly schematic cross-sectional view showing the structure of a prior art TMR read head 100 as used in a magnetic recording disk drive. This cross-sectional view is a view of what is commonly referred to as the air bearing surface (ABS) of the TMR readhead 100 . The TMR read head 100 includes a sensor stack formed between two ferromagnetic shield layers S1, S2, typically made of electroplated NiFe alloy films. The lower shield S1 is typically smoothed by chemical mechanical polishing (CMP) to provide a smooth surface for growing the sensor stack. The sensor stack includes: a ferromagnetic reference layer 120 with a pinned magnetization 121 oriented laterally (away from the page); an in-plane rotating magnetization 111; and an electrically insulating tunneling barrier layer 130, typically magnesium oxide (MgO), between the ferromagnetic reference layer 120 and the ferromagnetic free layer 110. In the quiescent state, ie, no magnetic field applied from ...
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