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High-voltage high-current single-pulse discharge switch and high-energy excimer laser

An excimer laser and single-pulse discharge technology, which is applied in the field of lasers, can solve the problem of excimer lasers not being able to stabilize discharge excitation, and achieve high operating voltage and high conduction power

Inactive Publication Date: 2016-11-16
HAINAN NORMAL UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In view of this, the present invention provides a high-voltage, high-current single-pulse discharge switch and a high-energy excimer laser to solve the technical problem that the above-mentioned excimer laser cannot stably implement high-efficiency discharge excitation

Method used

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  • High-voltage high-current single-pulse discharge switch and high-energy excimer laser
  • High-voltage high-current single-pulse discharge switch and high-energy excimer laser
  • High-voltage high-current single-pulse discharge switch and high-energy excimer laser

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Experimental program
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Effect test

Embodiment 1

[0033] Such as figure 1 As shown, a high-voltage, high-current single-pulse discharge switch, the high-voltage, high-current single-pulse discharge switch is a closed structure, filled with high-pressure gas, and the air pressure is kept constant by the air pressure control unit, so that the high-voltage, high-current single-pulse discharge switch It can work under a certain voltage; the high-voltage and high-current single-pulse discharge switch includes a housing 1, a first electrode 2, a second electrode 3, a rotating electrode 4 and a rotating shaft 5; The inner wall of the casing 1 is covered with ceramic sheets, which improve the insulation performance and facilitate the cleaning of sputters. The rotating shaft 5 is made of stainless steel and penetrates through the housing 1; the rotation of the rotating shaft 5 adopts the magnetic coupling method to obtain the motor power outside the switch. The rotating electrode 4 is nested on the rotating shaft 5; the first electro...

Embodiment 2

[0037] Such as Figure 1~4 As shown, a single-pulse low-frequency discharge excites a high-energy excimer laser, including a switch 101, a discharge cavity 11, and a gas storage cavity 102. The switch 101 is the same as the high-voltage, high-current single-pulse discharge switch of Embodiment 1, and the The number of discharge chambers 11 is four, and the four discharge chambers 11 are evenly arranged on the circumference of the gas storage chamber 102, and each discharge chamber 11 is controlled by a switch 101; the four discharge chambers 11 share one optical path system, the optical path system includes four optical paths 103, each optical path 103 corresponds to a discharge chamber 11, and the four optical paths 103 form an optical path system, and the optical path system is such as Figure 4 shown.

[0038] Such as figure 2 As shown, the design principle of the four discharge chambers 11: the single-pulse low-frequency discharge excites the high-energy excimer laser, ...

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Abstract

The invention discloses a high-voltage high-current single-pulse discharge switch and a high-energy excimer laser. The switch is of a closed structure and is filled with high-pressure gas with constant air pressure; the switch comprises a shell, a first electrode, a second electrode, a rotating electrode and a rotating shaft, wherein the rotating shaft penetrates through the shell; the rotating electrode is disposed on the rotating shaft; the first electrode and the second electrode are located on two sides of the rotating electrode and respectively stretch out of the shell; a first discharge gap is disposed between the rotating electrode and the first electrode; a second discharge gap is disposed between the rotating electrode and the second electrode; two sides of the first discharge gap and the second discharge gap are discharge plasma diffusion buffer areas; the shell is equipped with a gas port; and the gas port is used for gas to come in and go out. The switch has the characteristics of high working voltage, fast discharge, high conducting power and the like, the switch combines four discharge cavities, and a laser device capable of outputting high-energy laser is obtained.

Description

technical field [0001] The invention relates to the technical field of lasers, in particular to a high-voltage, high-current single-pulse discharge switch and a high-energy excimer laser. Background technique [0002] At this stage, laser technology is developing rapidly, and the laser industry is becoming more and more important. Gas lasers have the characteristics of high output power and low maintenance costs, making it maintain a large market share of lasers, especially in laser processing and In the field of material processing, high-power pulsed gas lasers are still the main tool for laser processing and material processing because of their high peak power and high coupling efficiency with materials; excimer lasers with output ultraviolet wavelengths cannot be replaced by solid-state lasers Variety. High-power pulsed gas lasers are the focus of the energy optoelectronics industry and the main tool for laser processing and material processing. [0003] High-power puls...

Claims

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Application Information

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IPC IPC(8): H01S3/036H01S3/038H01S3/09
CPCH01S3/036H01S3/0387H01S3/09
Inventor 彭鸿雁姜宏伟王继红张铁民
Owner HAINAN NORMAL UNIVERSITY
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