Processing method of large-sized sapphire ultrathin double-side-polished diaphragm

Abstract

The invention relates to a processing method of a large-sized sapphire ultrathin double-side-polished diaphragm. The method comprises steps as follows: (1) a sapphire crystal bar is cut into a sapphire diaphragm; (2) smoothing treatment is performed to protect edges; (3) annealing processing is performed at the annealing temperature of 1,450 DEG C; (4) coarse grinding processing of double-side grinding is performed; (5) secondary annealing processing is performed at the annealing temperature of 1,600 DEG C; (6) fine grinding processing of double-side grinding is performed; (7) ultrasonic cleaning is performed; (8) polishing is performed by the aid of a silica sapphire polishing liquid in a double-side polishing machine; (9) the sapphire double-side-polished diaphragm is obtained through ultrasonic cleaning. The method has the characteristics that the method is convenient to operate, the first pass yield is high, no diaphragm breakage occurs in the grinding process and the like, and is applicable to processing of sapphire double-side-polished diaphragms which have diameters being 4 inches and 6 inches and thicknesses ranging from 0.20 mm to 0.25 mm.

Description

technical field

[0001] The invention relates to a method for processing a large-size sapphire ultra-thin double-sided polishing window, and belongs to the technical field of double-sided grinding and double-sided polishing of sapphire window. Background technique

[0002] Sapphire crystal has excellent optical properties, physical properties and stable chemical properties, and is widely used in high-brightness LED substrate materials, various optical components, and window materials. Because of its good radiation resistance, it is often used Optical component materials exposed to radiation in aerospace and consumer electronics such as smartphone displays, Home buttons, and camera protection covers; however, the double-sided grinding and double-sided polishing in the prior art can only process 2 inches~ 6-inch and thickness ≥ 0.30mm sapphire double-sided polished window, for low-thickness and large-sized sapphire double-sided polished window, there are defects such as low pas...

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