Monocrystal texturing cleaning machine and technological method therefor

A cleaning machine and single crystal technology, applied in chemical instruments and methods, sustainable manufacturing/processing, crystal growth, etc., can solve the problems of unprovided equipment and automatic cleaning, and achieve safe and stable operation, saving labor costs, High cleaning effect

Pending Publication Date: 2016-12-07
苏州聚晶科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The above-mentioned existing patented technology cannot only provide what liquid is used to clean the silicon wafer after monocrystalline texturing, but does not provide corresponding equipment, and cannot realize automatic cleaning

Method used

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  • Monocrystal texturing cleaning machine and technological method therefor
  • Monocrystal texturing cleaning machine and technological method therefor
  • Monocrystal texturing cleaning machine and technological method therefor

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0034] Such as figure 1 As shown, a single crystal texturing cleaning machine includes a cleaning body 10. The cleaning body 10 includes three boxes. The positions of the feed port 101 and the discharge port 102 are respectively provided with a conveyor belt, and a plurality of manipulators for grabbing materials are arranged above the conveyor belt. One side of the cleaning body 10 is provided with a cleaning process for regulating and controlling the cleaning process in the cleaning body 10, and the cleaning process is carried out. The control cabinet 20 for real-time monitoring, the upper cover of the cleaning body 10 is provided with an air outlet, and the cleaning body 10 is also provided with a cashmere tank, pickling tank, water washing tank, pre-dehydration tank and drying tank, each tank body A heating device and a temperature sensor are provided, and a liquid dispensing and replenishing system connected to each tank body is also provided in the cleaning body 10 .

...

Embodiment 2

[0042] This embodiment provides a single crystal texturing cleaning process, which specifically includes the following steps:

[0043] S1. Put the silicon wafers into the flower basket, send it to the feeding port through the conveyor belt, and grab the flower basket by the manipulator and send it to the texturing tank, pickling tank, water washing tank, pre-dehydration tank and drying tank in turn;

[0044] S2. The processes of pre-cleaning, warm water rinsing, texturing corrosion, pure water rinsing, pickling, pre-dehydration and drying are respectively carried out by the texturing tank, pickling tank, water washing tank, pre-dehydration tank and drying tank;

[0045] S3. After being processed by the texturing tank, pickling tank, water washing tank, pre-dewatering tank and drying tank, the flower basket is picked up by the manipulator, placed on the conveyor belt, and sent to the discharge port.

[0046] In this embodiment, it is set to include real-time monitoring of the l...

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PUM

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Abstract

The invention discloses a monocrystal texturing cleaning machine. The monocrystal texturing cleaning machine comprises a cleaning body, wherein the cleaning body comprises three boxes; a material inlet is formed in the front end of the cleaning body while a material outlet is formed in the back end of the cleaning body; conveyor belts are arranged in the positions of the material inlet and the material outlet respectively; multiple mechanical arms for capturing materials are arranged above the conveyor belts; an air outlet is formed in an upper cover of the cleaning body; a texturing groove, an acid washing groove, a water washing groove, a pre-dewatering groove and a drying groove are also arranged in the cleaning body; a heating apparatus and a temperature sensor are arranged below each groove body; and liquid-distributing and liquid-supplementing systems connected with each of the groove bodies are also arranged in the cleaning body. By adoption of the monocrystal texturing cleaning machine, the automatic cleaning for the monocrystal texturing process can be realized; the overall cleaning process can be monitored and managed; and in addition, the monocrystal texturing cleaning machine adopts a box structure, so that the monocrystal texturing cleaning machine is applicable to industrial production.

Description

technical field [0001] The invention relates to single crystal texturing cleaning equipment, in particular to a single crystal texturing cleaning machine and a process method thereof. Background technique [0002] Silicon wafers need to be cleaned after a series of processing procedures. The purpose of cleaning is to eliminate all kinds of pollutants adsorbed on the surface of silicon wafers, and to make a suede structure that can reduce the reflection of sunlight on the surface. It directly affects the yield and reliability of cells. Texturing is the first process for manufacturing crystalline silicon cells, also known as "surface texturing". The effective textured structure makes the incident light reflect and refract multiple times on the surface of the silicon wafer, which increases the light absorption, reduces the reflectivity, and helps to improve the performance of the battery. [0003] Patent application number: 201410267231.9 discloses a cleaning method for monoc...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/67H01L31/18C30B33/10
CPCH01L31/1876H01L21/6704H01L21/67057C30B33/10Y02P70/50
Inventor 姜涛
Owner 苏州聚晶科技有限公司
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