Portable combined zero-adjustment high dynamic precision large working distance autocollimation device and method
A highly dynamic and portable technology, applied in the field of precision measurement and optical engineering, it can solve the problems that self-collimation and micro-angle measurement cannot be realized, the reflected beam deviates from the entrance pupil, and the range cannot be too large, etc.
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specific Embodiment 1
[0084] This embodiment is an embodiment of a portable combined zeroing high dynamic precision and large working distance autocollimation device.
[0085] The portable combined zeroing high dynamic precision and large working distance self-collimation device of this embodiment has a schematic structural diagram as figure 2 shown. The self-collimation device includes a light source 1, a reflective collimator 22, a reflector 3, and a feedback imaging system 6. The reflector 3 is provided with an angle adjustment measuring device 4; the light beam emitted by the light source 1 passes through a reflective collimator After the straight mirror 22 is collimated into a parallel light beam, it is reflected by the mirror 3 and incident on the surface of the measured object 5; the light beam reflected from the surface of the measured object 5 is then reflected by the mirror 3 and collected by the feedback imaging system 6 imaging;
[0086] The feedback imaging system 6 includes an imag...
specific Embodiment 2
[0093] This embodiment is an embodiment of a portable combined zeroing high dynamic precision and large working distance autocollimation device.
[0094] The portable combined zeroing high dynamic precision large working distance self-collimation device of this embodiment differs from the specific embodiment 1 in the structure of the feedback imaging system 6; the structure of the feedback imaging system 6 of this embodiment is the following two forms A sort of:
[0095] First, the feedback imaging system 6 includes a first feedback beam splitter 61, and an image sensor 65 and a four-quadrant detector 66 carried by a guide rail 68, such as Figure 6 Shown; Described guide rail 68 has two stop positions altogether, and a stop position makes image sensor 65 image plane centers correspond to the focus position of reflective collimating mirror 22, and another stop position makes four-quadrant detector 66 image plane centers correspond to reflective The focus position of the colli...
specific Embodiment 3
[0097] This embodiment is an embodiment of a portable combined zeroing high dynamic precision and large working distance autocollimation device.
[0098] The portable combined zeroing high dynamic precision and large working distance self-collimation device of this embodiment has a schematic structural diagram as Figure 8 shown. On the basis of the specific embodiment 1, the portable combined zeroing, high dynamic precision and large working distance self-collimation device of this embodiment is also provided with a wavefront detection system 7 and a wavefront compensation system 8;
[0099] The wavefront detection system 7 includes a wavefront detection spectroscope 71 and an air disturbance wavefront detector 72; the wavefront detection spectroscope 71 is arranged between the reflector 3 and the measured object 5, and the air disturbance wavefront detector 72 is arranged on the reflected optical path of the wavefront detection spectroscope 71, and the mirror deformation wa...
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