Method for measuring residual stress of metal microstructure

Abstract

The invention discloses a method for measuring residual stress of a metal microstructure, belongs to the technical field of micro manufacturing, and relates to a method for measuring residual stress of a metal microstructure. Solid particles with Raman activity are preprocessed and are mixed with an electroforming liquid to form a suspending liquid for micro electroforming. By taking the solid particles as stress tracking signals, the residual stress of the metal micro structure is measured through micro Raman spectrometry. The metal micro structure is prepared through adding the solid particles with the Raman activity to perform codeposition with metal, the problem of the restriction of incapability of measuring the residual stress of the metal micro structure by use of an X ray diffraction method is solved, the scope of application of the micro Raman spectrometry in measurement of the residual stress is expanded, the method has the advantages of wide application scope, simplicity and high efficiency, and the dimension precision and the manufacturing yield of a metal micro device are improved.

Description

technical field [0001] The invention belongs to the technical field of micro-manufacturing, and relates to a method for measuring the residual stress of metal microstructures. Background technique [0002] In the process of making metal micro devices by micro-electroforming technology, residual stress will inevitably be generated in the micro-electroforming layer. Larger residual stress is likely to cause problems such as surface cracks, structural deformation, and overall shedding of micro-devices, which greatly reduces the yield and service life of micro-devices. [0003] MEMS metal micro-devices generally have a functional structural design, and their minimum feature size is on the order of microns. Currently, the most commonly used method for measuring the residual stress of metal deposits is the X-ray diffraction method. However, this method can only be used to measure samples with a structure size larger than 10mm×10mm, and the X-ray diffraction method cannot be used...

AI Technical Summary

Problems solved by technology

However, metal is an atomic structure without vibration and rotation degrees of freedom. The plasma actually composed of electrons and atoms on the surface of the metal has a strong absorption of laser light, making it unable to interact with internal atoms. In theory, micro-Raman spectroscopy cannot measure Residual stress in metal microdevices

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