YIG (Yttrium Iron Garnet) band rejection filter based on planar resonant coupling structure and fabrication method of YIG band rejection filter

Abstract

The invention discloses a YIG (Yttrium Iron Garnet) band rejection filter based on a planar resonant coupling structure and a fabrication method of the YIG band rejection filter. The filter comprises a YIG band rejection filter and a driver, wherein the YIG band rejection filter comprises a resonant cavity, a planar resonant coupling structure, a permanent-magnet biasing magnetic path and an excitation coil, the planar resonant coupling structure is arranged in the resonant cavity, and the permanent-magnet biasing magnetic path provides a stable magnetic field for the resonant cavity. With the adoption of a mode of arranging a YIG thin film on a front surface of GGG (Gadolinium gallium garnet) glass and photoetching a coplanar waveguide circuit on the YIG thin film by sputtering, the planar resonant coupling structure is formed, a traditional spherical three-dimensional coupling structured YIG band rejection resonant coupling structure is substituted, and the technical defect existing in the traditional structure is also overcome. In the processing technology, The YIG thin film is first photoetched to a required shape according to a product shape needed to fabricate, and then the GGG glass is cut along appearance; and the defect of edge breakage or damage of the YIG thin film easily caused by directly cutting the YIG thin film based on a GGG substrate is overcome.

Description

technical field [0001] The invention relates to a filter and a manufacturing method, in particular to a YIG band-stop filter based on a planar resonant coupling structure and a manufacturing method. Background technique [0002] Magnetically tuned YIG bandstop filter is a very important electronic component, and has broad application prospects in the field of military electronic warfare. Magnetically tuned YIG band-rejection filters are usually used in the front-end part of broadband receivers to realize the microwave signal blocking function, which can transmit useful signals to suppress interference signals and protect the normal operation of the receiver. Due to the wide tuning range, high rejection, and good tuning linearity, compared with other technical approaches, the use of magnetically tuned YIG band-stop filters can not only greatly improve the overall technical and combat indicators of military electronic equipment, but also a single device can It can complete th...

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Problems solved by technology

[0005] The purpose of the present invention is to provide a solution to the above problems, which can realize the planarization and compaction of the YIG resonant coupling structure, and the process can be controlled with high precision, and the volume of the magnetically tuned YIG band-stop filter can be greatly reduced, lightened and reduced. , weight and power consumption, and effectively break through the process bottleneck problems of poor consistency and low assembly and adjustment efficiency caused by manual production of such devices. YIG band-stop filter based on planar resonant coupling structure and its manufacturing method

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